Sakon Nakhon Rajabhat University Journal

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4949 Sakon Nakhon Rajabhat University Journal

กลไกของการกอตัว ไทเทเนียมคารโบไนไตรด

โดยกระบวนการทางความรอน

กิตติชัย โสพันนา

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50

øĜķøøĩĚøţĤČĨĞùĤþķĎĳĎĳĐĬęĘûĩĚŧĵđķĐķČĚċŧ ĵċęøĚħđĞĐøĩĚĎĩþûĞĩĘĚŤĤĐ Formation Mechanisms of Titanium Carbonitride

by Thermal Process

ċĚ.øīČČīāĨę ĵġĕĨĐĐĩ ¹

đĎûĨċęţĤ

ķĎĳĎĳĐĬęĘđĚīġįĎďīĿ 99.7 % ēţĩĐøĩĚĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐĶĐĴøťġēġĘĤħĂīĎīĜĬĐ-ĴĤĘĵĘĳĐĬę ĳĒūĐĳĞĜĩ 2 āĨĻĞĵĘþ ĶĐāţĞþĤįĊĢėİĘī 1,150 - 1,250 ĤþğĩĳĂĜĳĂĬęġ ċŤĞęĤĨČĚĩøĩĚķĢĜùĤþĴøťġĤħĂīĎīĜĬĐĴĜħĴĤĘĵĘĳĐĬę ûþĎĬĻĳĎţĩøĨđ 0.4 ĴĜħ 10 ĜİøđĩğøŧĳĂĐČīĳĘČĚČţĤĞīĐĩĎĬ ČĩĘĜŀĩċĨđ ÿĩøĐĨļĐČĚĞÿġĤđĜĨøĠĊħĳĀĕĩħùĤþġĩĚ ČĨĞĤęţĩþĵċęĶāŤĳûĚĮĻĤþĞĨċûĞĩĘĴùĺþĴđđĐİĒ (HK) øĜŤĤþÿįĜĎĚĚğĐŧĤīĳĜĺøČĚĤĐĴđđġţĤþøĚĩċ (SEM) øĩĚĳĜĬļęĞĳđĐ ĚĨþġĬĳĤøĂŧ(XRD) ĴĜħøĩĚĞīĳûĚĩħĢŧøĩĚøĚħÿĩęĕĜĨþþĩĐĚĨþġĬĳĤøĂŧ (EDX) ĕđĳĖġùĤþ TiC0.7N0.3 TiC0.3N0.7 ĴĜħ TiN ĂĭĻþġĤċûĜŤĤþøĨđēĜùĤþ EDX ûţĩûĞĩĘĴùĺþĴđđĐİĒġİþġįċĘĬûţĩĳĒūĐ 3.2 ĳĎţĩùĤþġĩĚĎĬĻķĘţķċŤĎŀĩûĩĚŧĵđķĐķČĚċŧ ėĩĕÿĩøøĜŤĤþÿįĜĎĚĚğĐŧĤīĳĜĺøČĚĤĐĴđđġţĤþøĚĩċùĤþġĩĚĎĬĻēţĩĐøĩĚĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐĴġċþčĭþûĞĩĘ ĢęĩđùĤþĕĮļĐēīĞ

ûŀĩġŀĩûĨĄ: ķĎĳĎĳĐĬęĘķĐķČĚċŧ, ķĎĳĎĳĐĬęĘûĩĚŧĵđķĐķČĚċŧ, ûĞĩĘĴùĺþĴđđĐİĒ, ûĩĚŧĵđķĐķČĚĳċāĨĐ

Abstract

Titanium purity 99.7% was carbonitrided in acetylene-ammonia mixtures for 2 h at a temperature range of 1,150-1,250 qC. Flow rate of acetylene and ammonia was set constantly at 0.4 and 10 cm³.s^-1, respectively. The samples were then characterized by Knoop hardness (HK) tester, a scanning electron microscope (SEM), an x-ray diffraction (XRD) and energy dispersive x-ray (EDX) analyzer. The XRD patterns showed that TiC0.7N0.3, TiC0.3N0.7 and TiN phases which was in agreement

1 ûĊħĞīĎęĩğĩġČĚŧĴĜħĳĎûĵĐĵĜęĬ ĘĢĩĞīĎęĩĜĨęĚĩāėĨĆġøĜĐûĚ ČŀĩđĜďĩČįĳāīþāįĘ ĤŀĩĳėĤĳĘĮĤþ ÿĨþĢĞĨċġøĜĐûĚ 47000

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5151 üćøÿćøöĀćüĉì÷ćúĆ÷øćßõĆäÿÖúîÙø; ðŘìĊę 4 ÞïĆïìĊę 8 : ÖøÖãćÙö – íĆîüćÙö 2555

Sakon Nakhon Rajabhat University Journal; 4(8) : July – December 2012 ⁵¹

with the EDX results. The maximum Knoop hardness value was 3.2 times of the non-carbonitrided sample. The SEM micrographs of the nitride and carbonitride samples showed a rough surface.

Keywords: TiN, TiCN, Knoop hardness, Carbonitridation

đĎĐŀĩ

ķĎĳĎĳĐĬęĘĳĒūĐĵĜĢħĎĬĻĘĬøĩĚĶāŤþĩĐĤęţĩþøĞŤĩþùĞĩþĵċęĳĀĕĩħĶĐĞþøĩĚĴĕĎęŧĴĜħĤįČġĩĢøĚĚĘ ĳĐĮĻĤþÿĩøĳĒūĐĵĜĢħĎĬĻĘĬûĞĩĘĴùĺþĴĚþ ĐļŀĩĢĐĨøĳđĩĴĜħĎĐČţĤøĩĚøĨċøĚţĤĐĶĐėĩĞħČţĩþ Ĺ ĴČţùŤĤċŤĤęùĤþĵĜĢħ āĐīċĐĬļøĺĎŀĩĶĢŤĳøīċĒũĄĢĩĶĐøĩĚĶāŤþĩĐċŤĞęĳāţĐĳċĬęĞøĨĐ ĤĩĎīĳāţĐ ûĞĩĘĳĢĐĬęĞĢĚĮĤûĞĩĘęĮċĢęįţĐĎĬĻÿŀĩøĨċ ĕĮļĐēīĞķĘţ ûţĤęċĬĎŀĩĶĢŤĳøīċøĩĚġĭøĢĚĤĳĞĜĩĳøīċøĩĚĳġĬęċġĬ

ķĎĳĎĳĐĬęĘûĩĚŧĵđķĐķČĚċŧ (TiCN) ĳĒūĐġĩĚĒĚħøĤđĎĬĻĚİŤÿĨøøĨĐċĬĞţĩĘĬûĞĩĘĴùĺþ ĎĐČţĤøĩĚġĭøĢĚĤ ġĨĘĒĚħġīĎďīĿûĞĩĘĳġĬęċĎĩĐČĻŀĩ ĘĬÿįċĢĜĤĘĳĢĜĞġİþ ĴĜħĘĬĐļŀĩĢĐĨøĳđĩĤĬøċŤĞę ĞīďĬøĩĚĳČĚĬęĘġĩĚĒĚħøĤđ ķĎĳĎĳĐĬęĘûĩĚŧĵđķĐķČĚċŧĎĬĻĐīęĘøĨĐ ûĮĤ Physical Vapor Deposition (PVD) ĴĜħ Chemical Vapor Deposition (CVD) ĳĒūĐČŤĐ (Rebelo de Figueiredo. et al. 2008: 525) ġŀĩĢĚĨđøĩĚĒĚħęįøČŧĶāŤþĩĐĵċęøĩĚĳûĜĮĤđ ġĩĚĒĚħøĤđķĎĳĎĳĐĬęĘûĩĚŧĵđķĐķČĚċŧđĐĵĜĢħāīļĐþĩĐ ĳāţĐ ĶāŤĳĒūĐĤįĒøĚĊŧĶĐøĩĚĶāŤþĩĐÿŀĩĕĞøČĨċĳÿĩħĴĜħ ĴĘţĕīĘĕŧ øĨþĢĨĐĜĘĚŤĤĐ ĚĞĘĎĨļþĤįĒøĚĊŧĶĐĤįČġĩĢøĚĚĘĳûĚĮĻĤþęĐČŧĴĜħĤįČġĩĢøĚĚĘøĩĚđīĐ

øĩĚĳûĜĮĤđĵċęĞīďĬøĩĚùŤĩþČŤĐÿħĶāŤ substrate ĎĬĻĳĒūĐĵĜĢħĳāţĐ ĳĢĜĺøĢĚĮĤĳĢĜĺøøĜŤĩ ĳĒūĐČŤĐ ĎŀĩĶĢŤ āīļĐþĩĐĎĬĻčİøĳûĜĮĤđĳøīċĒũĄĢĩ ĐĨĻĐûĮĤÿħķċŤûĞĩĘĢĐĩĚħċĨđĢĐĭĻþĳĎţĩĐĨļĐĳĐĮĻĤþÿĩøÿħĳøīċûĞĩĘĳûŤĐĎĬĻĚĤęČţĤùĤþ ĖŚĜŧĘĴĜħČĨĞĴēţĐāīļĐþĩĐĎĬĻčİøĳûĜĮĤđ ĂĭĻþÿħġţþēĜČţĤĤĩęįøĩĚĶāŤþĩĐùĤþĤįĒøĚĊŧĐĨļĐ Ĺ ēİŤĞīÿĨęĳûęķċŤĎŀĩøĩĚĞīÿĨę ĵċęøĩĚĳûĜĮĤđēīĞĜþđĐāīļĐþĩĐĎĬĻĳĒūĐĵĜĢħēġĘĴøĘĘĩķĎĳĎĳĐĬęĘ-ĤħĜİĘīĳĐĬęĘ (J-TiAl) ĵċęĞīďĬķĐķČĚĳċāĨĐČĚþ ĵĜĢħ-Ĵøťġ (Direct metal-gas nitridation, DMGN) (Sopunna. et al. 2006: 4654) ĂĭĻþĳĒūĐĞīďĬøĩĚĎĬĻČŤĐĎįĐčİø ĴĜħĳĒūĐķĒķċŤĎĬĻÿħČţĤęĤċġİţøĩĚĳĒūĐĐĞĨČøĚĚĘ ĕđĞţĩķċŤġĩĚĒĚħøĤđķĎĳĎĳĐĬęĘķĐķČĚċŧ (TiN) ĴĜħġĩĚĒĚħøĤđ ĤĮĻĐĎĬĻĳÿĮĤĒĐĤĬøċŤĞę ĳāţĐ Al2O3 Ti3Al ĳĒūĐČŤĐ ĂĭĻþûĩċĞţĩĐţĩÿħĳĒūĐġĩĳĢČįĢĐĭĻþĎĬĻĎŀĩĶĢŤāīļĐþĩĐĎĬĻēţĩĐøĩĚĳûĜĮĤđĘĬ ûĞĩĘĴùĺþķĘţċĬĳĎţĩĎĬĻûĞĚ ĤĬøĎĨļþĖŚĜŧĘùĤþġĩĚĒĚħøĤđĘĬûĞĩĘĳĒĚĩħĢĚĮĤĘĬûĞĩĘęĮċĢęįţĐĐŤĤę ċŤĞęĳĢČįĐĬļēİŤĞīÿĨęÿĭþ ûĩċĞţĩčŤĩĒĚħęįøČŧøĩĚĳûĜĮĤđċŤĞęĞīďĬ DMGN ĜþđĐĵĜĢħķĎĳĎĳĐĬęĘđĚīġįĎďīĿ (ĒĚħĘĩĊ 99%) ĴĜħĳûĜĮĤđĳĒūĐ ġĩĚĒĚħøĤđûĩĚŧĵđķĐķČĚċŧ ĐţĩÿħĎŀĩĶĢŤķċŤġĩĚĒĚħøĤđĎĬĻĘĬġĘđĨČīċĬùĭļĐ

ĳĘĮĻĤĞīÿĨęĳġĚĺÿġīļĐĴĜŤĞûĩċĞţĩĐţĩÿħķċŤĤþûŧûĞĩĘĚİŤĳøĬĻęĞøĨđøĩĚĳûĜĮĤđēīĞĵĜĢħķĎĳĎĳĐĬęĘĵċęøĩĚ ĒĚħęįøČŧĞīďĬ DMGN ĴĜħĤþûŧûĞĩĘĚİŤĎĬĻķċŤÿħġţþēĜčĭþøĩĚĕĨĉĐĩøĩĚĳûĜĮĤđēīĞùĤþĵĜĢħķĎĳĎĳĐĬęĘĚĞĘĎĨļþĵĜĢħ āĐīċĤĮĻĐ ĴĜħġĩĘĩĚčĎĬĻÿħČţĤęĤċġİţøĩĚĳĒūĐĐĞĨČøĚĚĘĎĬĻÿħġĚŤĩþĚĩęķċŤĴĜħāĮĻĤĳġĬęþġİţĒĚħĳĎğāĩČīČţĤķĒ

Sakon Nakhon Rajabhat University Journal

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ĞĨġċį ĤįĒøĚĊŧĴĜħĞīďĬċŀĩĳĐīĐøĩĚĞīÿĨę (Materials and methods)

ķĎĳĎĳĐĬęĘûĞĩĘđĚīġįĎďīĿ 99.7 % ĘĬĚİĒĚţĩþĳĒūĐĴĎţþøĜĘ (Rod shape) ùĐĩċĳġŤĐēţĩğİĐęŧøĜĩþĒĚħĘĩĊ 20.0 mm čİøČĨċĶĢŤĘĬûĞĩĘĢĐĩĒĚħĘĩĊ 1-2 mm ĵċęĶāŤĳûĚĮĻĤþČĨċġĩĚĎĬĻĘĬùĤđĳĒūĐĳĕāĚ (Diamond saw) ùĨċ ċŤĞęøĚħċĩĠĎĚĩęĳđĤĚŧ 100, 400 ĴĜħ 1000 ÿĩøĐĨļĐùĨċċŤĞęēþĤħĜİĘīĐĩ (Alumina) ùĐĩċ 1 ĴĜħ 0.3 Pm ČĩĘĜŀĩċĨđ ċŤĞęĳûĚĮĻĤþùĨċġĩĚĴđđÿĩĐĢĘįĐĘĬēŤĩùĨċ ĶāŤġŀĩĢĚĨđùĨċĘĨĐ (Polishing) ĳġĚĺÿĴĜŤĞĜŤĩþûĚĩđķùĘĨĐĴĜħġīĻþ ġøĒĚøċŤĞęĤħĂīĵČĐ ġĩĚČĨĞĤęţĩþĎĬĻēţĩĐøĩĚùĨċčİøĐŀĩĶġţĶĐĢŤĤþĳēĩ (Chamber) ċĨþėĩĕĒĚħøĤđ 1 ĴĜŤĞĒŚċĔĩ ĢŤĤþĳēĩĶĢŤġĐīĎ ÿĩøĐĨļĐċİċĤĩøĩğĤĤø (Evacuated) ĵċęĶāŤĒũŮĘĵĚČĩĚĬ (Rotary pump) ĂĭĻþÿħĎŀĩĶĢŤėĩęĶĐĢŤĤþĳēĩ ĘĬûĞĩĘċĨĐġĨĘđİĚĊŧ (Absolute pressure) ĳĒūĐ 17.33 kPa ĴĜŤĞĒĜţĤęĴøťġĤĩĚŧøĤĐĎĬĻĘĬĤĨČĚĩøĩĚķĢĜĳĎţĩøĨđ 10 cm³.s^-1 ĳùŤĩġİţĢŤĤþĳēĩ ÿĩøĐĨļĐøĺĎŀĩøĩĚċİċĤĩøĩğĤĤøĤĬøĴĜŤĞĒĜţĤęĴøťġĤĩĚŧøĤĐĳùŤĩķĒĤĬøĵċęĎŀĩĜĨøĠĊħĳāţĐĐĬļ Ăļŀĩ Ĺ øĨĐ 10 ûĚĨļþ ĳĕĮĻĤĶĢŤĘĬĤĩøĩğĳĢĜĮĤĤęİţĶĐĢŤĤþĳēĩĐŤĤęĎĬĻġįċ (ķĘţĳøīĐ 5 ppb) ġįċĎŤĩęÿĭþĒĜţĤęĴøťġĤĩĚŧøĤĐĶĢŤ ēţĩĐĳùŤĩġİţĢŤĤþĳēĩ ČţĤÿĩøĐĨļĐĳĕīĻĘĤįĊĢėİĘīùĤþĳČĩĳēĩ (Furnace) ÿĐĤįĊĢėİĘīčĭþ 1,150 qC ÿĭþĒŚċĴøťġĤĩĚŧøĤĐ ĴĜŤĞĒĜţĤęĴøťġĴĤĘĵĘĳĐĬęĴĜħĤħĂīĎīĜĬĐĳùŤĩġİţĢŤĤþĳēĩ ĳĕĮĻĤĎŀĩøĩĚĳûĜĮĤđġĩĚČĨĞĤęţĩþĵċęĶĢŤĤĨČĚĩøĩĚķĢĜùĤþ ĴøťġĴĤĘĵĘĳĐĬęĳĎţĩøĨđ 10 cm³.s^-1 ĴĜħĴøťġĤħĂīĎīĜĬĐĳĎţĩøĨđ 0.4 cm³.s^-1 ĳĘĮĻĤûĚđ 2 āĨĻĞĵĘþ ĎŀĩøĩĚĒŚċĴøťġĎĨļþ ġĤþ ĴĜħĳĒŚċĴøťġĤĩĚŧøĤĐĕĚŤĤĘøĨđĒŚċġĞīČĂŧāįċûĞđûįĘĳČĩĳēĩĚĤÿĐøĚħĎĨĻþĤįĊĢėİĘīĜċĜþÿĐčĭþĤįĊĢėİĘīĢŤĤþ ÿĭþĐŀĩġĩĚĎĬĻēţĩĐøĩĚĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐĤĤøÿĩøĢŤĤþĳēĩ ĶĐøĩĚĎċĜĤþÿħĳĒĜĬĻęĐĤįĊĢėİĘīĳĒūĐ 1,200 ĴĜħ 1,250 qC ġĩĚĎĬĻēţĩĐøĩĚĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐÿħĐŀĩķĒĎċġĤđûĞĩĘĴùĺþĴđđĐİĒ (Knoop hardness; HK) ċŤĞę ĳûĚĮĻĤþĞĨċĚįţĐ MXT-D7 Matsuzawa Seiki ĵċęĶāŤĐļŀĩĢĐĨøøċ 50 gf ĵċęĘĬĳĞĜĩĶĐøĩĚøċ (Dwelling time) 5 ĞīĐĩĎĬ ġįċĎŤĩęÿĭþĐŀĩġĩĚČĨĞĤęţĩþķĒĞĨċøĩĚĳĜĬļęĞĳđĐùĤþĚĨþġĬĳĤøĂŧ (XRD) āĐīċ Cu - KD ċŤĞęĳûĚĮĻĤþ BRUKER AXS company series D8 ADVANCE ĒĚħøĤđċŤĞę JCPDS software (Powder Diffract. File, 2001) ĎĬĻûĞĩĘČţĩþ ğĨøęŧ 45.0 kV øĚħĴġķĖĖşĩ 35.0 mA ĴĜħčţĩęėĩĕċŤĞęĳûĚĮĻĤþĤīĳĜĺøČĚĤĐĴđđġţĤþøĚĩċ (SEM) ĚĞĘĎĨļþĞĨċøĩĚ øĚħÿĩęĕĜĨþþĩĐĚĨþġĬĳĤøĂŧ (EDX) ċŤĞęĳûĚĮĻĤþĚįţĐ Jeol: JSM-6335F ČţĤķĒ

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üćøÿćøöĀćüĉì÷ćúĆ÷øćßõĆäÿÖúîÙø; ðŘìĊę 4 ÞïĆïìĊę 8 : ÖøÖãćÙö – íĆîüćÙö 2555

Sakon Nakhon Rajabhat University Journal; 4(8) : July – December 2012 ⁵³

ėĩĕĎĬĻ 1 Schematic diagram ùĤþøĩĚĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐ

ēĜøĩĚĞīÿĨęĴĜħĞīĳûĚĩħĢŧēĜøĩĚĞīÿĨę (Results and discussion)

ĤĨČĚĩøĩĚķĢĜùĤþĴøťġ

ėĩĕĎĬĻ 2 øĚĩĖĴġċþûĞĩĘġĨĘĕĨĐďŧĚħĢĞţĩþĤĨČĚĩøĩĚķĢĜùĤþĴøťġøĨđûĞĩĘĴČøČţĩþ ùĤþĚħċĨđûĞĩĘġİþùĤþùĤþĳĢĜĞĶĐĢĜĤċĴøŤĞĚİĒČĨĞęİ

ÿĩøėĩĕĒĚħøĤđ 2 ġĩĘĩĚčĢĩûĞĩĘġĨĘĕĨĐďŧĶĐĚİĒùĤþġĘøĩĚĳġŤĐČĚþķċŤċĨþĐĬļ ĴøťġĴĤĘĵĘĳĐĬę : log Q = 1.2522(log 'H) - 0.9816

ĴøťġĤĩĚŧøĤĐ : log Q = 0.7445(log 'H) + 0.1049 ĴøťġĤħĂīĎīĜĬĐ : log Q = 0.6983(log 'H) - 1.3899

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ĶĐøĩĚĎċĜĤþĶāŤĤĨČĚĩøĩĚķĢĜùĤþĴøťġĴĤĘĵĘĳĐĬę ĴøťġĤĩĚŧøĤĐĴĜħĴøťġĤħĂīĎīĜĬĐûþČĨĞĳĎţĩøĨđ 10,10 ĴĜħ 0.4 cm³.s^-1 ČĩĘĜŀĩċĨđ ÿĩøøĩĚûŀĩĐĞĊÿħķċŤĚħċĨđûĞĩĘĴČøČţĩþùĤþûĞĩĘġİþùĤþùĤþĳĢĜĞĶĐĢĜĤċĴøŤĞ ĚİĒČĨĞęİùĤþĴøťġĴĤĘĵĘĳĐĬęĴĜħĤĩĚŧøĤĐĳĒūĐ 38.02, 15.85 ĴĜħ 26.30 cm ČĩĘĜŀĩċĨđ

øĩĚĞīĳûĚĩħĢŧ XRD

ėĩĕĎĬĻ 3 øĚĩĖ XRD ùĤþ Ti ĵċęûĩĚŧĵđķĐķČĚĳċāĨĐ 2 āĨĻĞĵĘþ ĎĬĻĤĨČĚĩøĩĚķĢĜùĤþĴøťġĴĤĘĵĘĳĐĬę 10 cm³.s^-1 ĴĜħĴøťġĤħĂīĎīĜĬĐ 0.4 cm³.s^-1

ķĎĳĎĳĐĬęĘĘĬøĩĚĳĒĜĬĻęĐĴĒĜþĳĖġùĤþ specimens ĢĜĨþÿĩøĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐĳĒūĐĳĞĜĩ 2 āĨĻĞĵĘþ ĎĬĻ 1,150, 1,200 ĴĜħ 1,250 qC ĴġċþċĨþėĩĕĒĚħøĤđ 3 ĕīÿĩĚĊĩĎĬĻĤįĊĢėİĘī 1,150 qC ĕđĳĕĬęþĳĖġùĤþ TiN ĳĕĬęþĳĖġĳċĬęĞĳĎţĩĐĨļĐ ķĘţĕđĳĖġĎĬĻĘĬûĩĚŧđĤĐĳĒūĐĤþûŧĒĚħøĤđ ĳĐĮĻĤþÿĩøĕĜĨþþĩĐĤīġĚħùĤþøĩĚĚĞĘČĨĞ (Free energy of formation) ùĤþTiN ČĻŀĩøĞţĩ TiC ċĨþĐĨļĐĵĤøĩġøĩĚĳøīċ TiN ÿĭþĘĬĘĩøøĞţĩ TiC (Wicks and Block. 1963:

124) ĴČţĤęţĩþķĚøĺČĩĘĤĩÿĳĒūĐķĒķċŤĞţĩ specimens ĳøīċøĩĚĳĒĜĬĻęĐĴĒĜþĳĖġĎĬĻĘĬûĩĚŧđĤĐĳĒūĐĤþûŧĒĚħøĤđ ĳĕĬęþĴČţĘĬĒĚīĘĩĊùĤþġĩĚĒĚħøĤđĎĬĻĳøīċùĭļĐĐŤĤęĳøīĐķĒÿĐķĘţġĩĘĩĚčČĚĞÿĕđķċŤ

ĳĘĮĻĤĳĒĜĬĻęĐĤįĊĢėİĘīĶĐøĩĚĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐġİþùĭļĐĳĒūĐ 1,200 qC ĘĬûĞĩĘāĨċĳÿĐĞţĩĕđ TiC0.7N0.3

ĳĕīĻĘùĭļĐĤĬøĢĐĭĻþġĩĚĒĚħøĤđ ĴġċþĞţĩĤħČĤĘùĤþûĩĚŧđĤĐġĩĘĩĚčĜħĜĩęĳùŤĩķĒĶĐĵûĚþġĚŤĩþùĤþ Ti ķċŤċŤĞę

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ĵûĚþġĚŤĩþĎĬĻĳĢĘĮĤĐøĨĐ ġŀĩĢĚĨđøĜķøĶĐøĩĚøţĤČĨĞùĤþ TiN ĴĜħ TiC0.7N0.3 ċŤĞęĵûĚþġĚŤĩþĎĬĻûĜŤĩęøĨĐ (George, Wayne and Menachem. 998: 345) ċĨþĐĨļĐĤĩÿÿħøţĤČĨĞċŤĞęøĜķøĳċĬęĞøĨĐ ĵċęĤĩÿĳøīċÿĩøķĐĵČĚĳÿĐĤħČĤĘĎĬĻ ġĜĩęÿĩøĴĤĘĵĘĳĐĬęĴĜħûĩĚŧđĤĐĤħČĤĘĎĬĻġĜĩęÿĩøĤħĂīĎīĜĬĐĚĞĘČĨĞøĨđķĎĳĎĳĐĬęĘĤħČĤĘĎĬĻēīĞĴĜħĤĩÿĴĕĚţ ĳùŤĩķĒĚĞĘøĨđĤħČĤĘċŤĩĐĜţĩþ ĢĚĮĤĤĩÿÿħĳøīċÿĩøķĎĳĎĳĐĬęĘĤħČĤĘċŤĩĐĜţĩþĘĬøĩĚĴĕĚţùĭļĐĘĩċŤĩĐđĐĴĜŤĞĎŀĩ ĒĆīøīĚīęĩøĨđķĐĵČĚĳÿĐĤħČĤĘĴĜħûĩĚŧđĤĐĤħČĤĘĳøīċČøČħøĤĐĳĒūĐ TiN ĴĜħ TiC0.7N0.3 ĎĬĻēīĞ (Zhao. et al.

2002:581) øĩĚĎĬĻĳøīċĳĖġùĤþ TiC0.7N0.3 ġţĞĐĎĬĻķĘţġĩĘĩĚčĕđĳĖġùĤþ TiC øĺĳĐĮĻĤþĘĩÿĩøTiNĘĬ thermodynamically stable ĘĩøøĞţĩ TiC (Wicks and Block. 1963: 124) ÿĭþĎŀĩĶĢŤ TiN ĘĬĵĤøĩġĳøīċĘĩøøĞţĩ TiC ġŀĩĢĚĨđĤĤøķĂċŧùĤþķĎĳĎĳĐĬęĘČĚĞÿķĘţĕđĤĩÿÿħĳøīċÿĩøøĩĚĢĜþĳĢĜĮĤùĤþĤĤøĂīĳÿĐėĩęĶĐĢŤĤþĳēĩøţĤĐ øĩĚĎċĜĤþĐŤĤęĘĩøĳĕĚĩħĞţĩ ÿĩøøĩĚûŀĩĐĞĊĒĚīĘĩĊ O2 ÿħĘĬÿŀĩĐĞĐĐŤĤęĘĩøûĮĤķĘţĳøīĐ 5 ppm ġŀĩĢĚĨđĎĬĻ ĤįĊĢėİĘī 1,250 qC ĕđĳĖġùĤþ TiN ĴĜħ TiC0.3N0.7 øĜķøøĩĚøţĤČĨĞĳĢĘĮĤĐøĨđĎĬĻĤįĊĢėİĘī 1,200 qC ĳĕĬęþĴČţĞţĩ ĳĒĤĚŧĳĂĐČŧùĤþķĐĵČĚĳÿĐĤħČĤĘĘĩøøĞţĩûĩĚŧđĤĐĤħČĤĘ ĂĭĻþĤĩÿÿħĳĒūĐĳĕĚĩħķĐĵČĚĳÿĐĤħČĤĘĴĎĚøĳùŤĩķĒøţĤ ČĨĞøţĤĐÿĐķĘţĳĢĜĮĤĎĬĻĞţĩþĶĢŤøĨđûĩĚŧđĤĐĤħČĤĘ

ûĞĩĘĴùĺþ Knoop

ėĩĕĒĚħøĤđ 4 ûĞĩĘĴùĺþ Knoop ĳĀĜĬĻęùĤþ Ti

ÿĩøėĩĕĒĚħøĤđ 4 Ĵġċþûţĩ HK ùĤþġĩĚ Ti ĎĬĻ load 50 gf ûţĩ HK ùĤþ specimens ĎĬĻķĘţķċŤĎŀĩûĩĚŧĵđ ķĐķČĚĳċāĨĐùĤþ Ti ĘĬûţĩĳĒūĐ 136.8 kg.mm^-2 ġŀĩĢĚĨđ specimens ĎĬĻĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐùĤþġĩĚ Ti Ďŀĩ

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56

ûĩĚŧĵđķĐķČĚĳċāĨĐĎĬĻĤįĊĢėİĘī 1,150, 1,200 ĴĜħ 1,250 qC ĳĒūĐĳĞĜĩ 2 āĨĻĞĵĘþ ĘĬûţĩĳĒūĐ 403.4, 412.0 ĴĜħ 439.8 kg.mm^-2 ČĩĘĜŀĩċĨđ ÿĩøûţĩ HK ùĤþġĩĚĒĚħøĤđùŤĩþČŤĐ ÿħĳĢĺĐĞţĩĘĬûţĩĳĕīĻĘùĭļĐÿĩøġĩĚĎĬĻķĘţķċŤĎŀĩûĩĚŧ ĵđķĐķČĚĳċāĨĐ ĤęţĩþĳċţĐāĨċ ĳāţĐ ĎĬĻĳþĮĻĤĐķùøĩĚĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐĎĬĻĤįĊĢėİĘī 1,150, 1,200 ĴĜħ 1,250 qC ĘĬ ûţĩĳĕīĻĘùĭļĐĳĒūĐ 2.9, 3.0 ĴĜħ 3.2 ĳĎţĩùĤþġĩĚķĘţķċŤĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐ

ûţĩ HK ùĤþøĩĚĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐĘĬĘĩøøĞţĩķĘţķċŤĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐĢĜĩęĳĎţĩ ġĩĳĢČįøĺĳĐĮĻĤþÿĩø ĳøīċġĩĚĒĚħøĤđķĐķČĚċŧĴĜħûĩĚŧķđċŧùĭļĐĎĬĻēīĞùĤþġĩĚČĨĞĤęţĩþĂĭĻþġĩĚĒĚħøĤđĎĬĻĳøīċùĭļĐĐĬļĘĬûĞĩĘĴùĺþĘĩøøĞţĩ ġĩĚČĨļþČŤĐ ġţĞĐûţĩ HK ĎĬĻĤįĊĢėİĘī 1,150 qC ĐŤĤęøĞţĩ 1,200 ĴĜħ 1,250 qC ĳĐĮĻĤþÿĩøĎĬĻĤįĊĢėİĘī 1,200 ĴĜħ 1,250 qC ĳøīċġĩĚĒĚħøĤđûĩĚŧĵđķĐķČĚċŧùĭļĐÿĭþĎŀĩĶĢŤĘĬûĞĩĘĴùĺþĳĕīĻĘùĭļĐĳĜĺøĐŤĤę øĩĚĳĕīĻĘùĭļĐĤęţĩþĘĩøùĤþûţĩ HK ĴġċþčĭþûĞĩĘġŀĩĳĚĺÿĤęţĩþĘĩøùĤþøĩĚĒĚĨđĒĚįþûĞĩĘĴùĺþùĤþġĩĚĵċęĞīďĬĐĬļĂĭĻþĴġċþĶĢŤĳĢĺĐĤęţĩþāĨċĳÿĐđĐ XRD pattern

øĩĚĞīĳûĚĩħĢŧ SEM

ėĩĕĎĬĻ 5 SEM micrograph ùĤþ Ti ĎĬĻķĘţķċŤĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐ

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Sakon Nakhon Rajabhat University Journal; 4(8) : July – December 2012 ⁵⁷

ėĩĕĎĬĻ 6 SEM micrograph ùĤþ Ti ĵċęûĩĚŧĵđķĐķČĚĳċāĨĐ ĎĬĻĤįĊĢėİĘī 1,150 qC ĳĒūĐĳĞĜĩ 2 āĨĻĞĵĘþ

ėĩĕĎĬĻ 7 SEM micrograph ùĤþ Ti ĵċęûĩĚŧĵđķĐķČĚĳċāĨĐ ĎĬĻĤįĊĢėİĘī 1,200 qC ĳĒūĐĳĞĜĩ 2 āĨĻĞĵĘþ

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58

ĳĞĜ ĒĚħ ĶĢŤĳøī ČĨĞĤ

ÿĩøėĩ ĩ 2 āĨĻĞĵĘþ ĕĮļĐ ħøĤđĳùŤĩøĨĐĳĒū

øīċûĞĩĘĳġĬęċĎ øĩĚĞīĳû Ĥęţĩþ ķċŤ spect

ėĩĕĎĬ

ĩĕĒĚħøĤđ 5 – ĐēīĞùĤþġĩĚČĨ

ĐĳĖġĶĢĘţ ĵċę ĎĩĐĘĩøùĭļĐĳĘĮĻ ûĚĩħĢŧ EDX

tra ċĨþėĩĕĒĚħ

ėĩĕĎĬ

ĎĬĻ 8 SEM mic ĎĬĻĤįĊĢėİ – 8 ĳĒūĐĜĨøĠĊ ĨĞĤęţĩþĴġċþčĭ ęĴġċþķċŤċŤĞęē

ĤĐŀĩķĒĶāŤþĩĐ ÿĩøøĩĚĞīĳûĚ ħøĤđ 9 – 12

ĎĬĻ 9 EDX spec

crograph ùĤþ ėİĘī 1,250 qC ĊħġĨĊćĩĐĞīĎęĩ

þ rough surfa ēĜøĩĚĞīĳûĚĩħ (Sopunna. et ĩħĢŧ EDX ĳĕĮ

ctra ùĤþ Ti ĎĬĻķ

Ti ĵċęûĩĚŧĵđķ ĳĒūĐĳĞĜĩ 2 āĨĻ ĩùĤþ Ti ĎĬĻûĩĚŧ ace ĎĬĻĒøûĜįĘċŤ

Ģŧ XRD ĂĭĻþûĞĩ al. 2004: 810 ĕĮĻĤĎĬĻÿħċİďĩČįČţ

ķĘţķċŤĎŀĩûĩĚŧĵđķ

ķĐķČĚĳċāĨĐ āĨĞĵĘþ

ĚŧĵđķĐķČĚĳċāĨĐ ċŤĞęûĞĩĘĢĜĩ ĩĘùĚįùĚħĳĒūĐĕ 0)

ČţĩþĹ ĎĬĻĒĚħøĤ

ķĐķČĚĳċāĨĐ

ĐĎĬĻ 1,150-1,250 øĢĜĩęùĤþ cl ĕĩĚĩĘīĳČĤĚŧĢĐĭ ĤđĤęİţđĐĕĮļĐēīĞ

0 qC ĳĒūĐ usters ĎĬĻ ĐĭĻþĎĬĻÿħĎŀĩ ĞùĤþġĩĚ

(11)

üćøÿSakoÿćøöĀćüĉì÷ćúĆ÷ø on Nakhon R

ėĩĕĎĬĻ 10

ėĩĕĎĬĻ 11

øćßõĆäÿÖúîÙø;

ajabhat Univer

EDX spectra

EDX spectra ù

ðŘìĊę 4 ÞïĆïìĊę 8 rsity Journal;

ùĤþ Ti ĵċęûĩ

: ÖøÖãćÙö – íĆî 4(8) : July – De

ĩĚŧĵđķĐķČĚĳċā

ĚŧĵđķĐķČĚĳċāĨĐ

îüćÙö 2555 ecember 2012

āĨĐ ĎĬĻĤįĊĢėİĘī

ĨĐ ĎĬĻĤįĊĢėİĘī 1

1,150 qC ĳĒūĐ

,200 qC ĳĒūĐ

ĐĳĞĜĩ 2 āĨĻĞĵĘ

59

Ęþ

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60 ķĎĳĎ ċŤĞę ķĘţĕ 41.2 ĳĕīĻĘ ČĤĐ ĒĚīĘ ĳĕĚ øĚĩ ďĩČį 13 –

ėĩĕĎĬĻ 12 ÿĩø EDX ĎĳĐĬęĘĳĎţĩĐĨļĐ ęĤĨČĚĩġţĞĐēġ ĕđûĩĚŧđĤĐĂĭĻþ

24 atomic % ġţĞĐøĩĚ ĘùĭļĐĤĬøĢĐĭĻþďĩ ĐČŤĐ ĴČţĒĚīĘĩ ĘĩĊùĤþûĩĚŧđ ĚĩħĞţĩĳĒūĐďĩČįĎĬ

ĩĖķĘţĴČøČţĩþøĨ øĩĚĞīĳû ČįČţĩþ Ĺ ĎĬĻĒĚħø

– 18

EDX spectra X spectra ĕ ċĨþėĩĕĒĚħøĤ

ĘùĤþĴøťġĴĤĘ ġĤċûĜŤĤþøĨđ ĳĎţĩĐĨļĐċĨþėĩĕ ĚĎŀĩûĩĚŧĵđķĐķČ

Čį ĒĚīĘĩĊùĤþ ĩĊûĩĚŧđĤĐĤħ đĤĐĤħČĤĘĎĬĻĤį

ĎĬĻČĚĞÿĕđČĤĐ øĨĐĘĩøĐĨø ûĚĩħĢŧėĩûČĨċ

øĤđĤęİţđĐėĩ

ùĤþ Ti ĵċęûĩ ĕđĞţĩġĩĚĎĬĻķĘţķ Ĥđ 9 ġţĞĐġĩĚ ĘĵĘĳĐĬę ĴĜħ Ĥ đ XRD ĎĬĻĕđĳĀ ĕĒĚħøĤđ 10

ČĚĳċāĨĐĎĬĻ 1,20 þķĐĵČĚĳÿĐĤħ ħČĤĘÿĩøûĞĩ ĤįĊĢėİĘī 1,200

ĐĳĚīĻĘČŤĐùĤþøĚ ċùĞĩþ ÿĩøøĩ

ûČĨċùĞĩþùĤþ

ĩĚŧĵđķĐķČĚĳċāĨ ķċŤĎŀĩûĩĚŧĵđķĐ ĚČĨĞĤęţĩþĎĬĻĎŀĩ ĤħĂīĎīĜĬĐ ĳĎţĩøĨ ĀĕĩħĳĖġùĤþ

00 qC ĴĜħ 1 ħČĤĘġĤċûĜŤĤ ĩĘġİþùĤþøĚĩĖ 0 qC ČŤĤþĘĩ ĚĩĖċŤĞęĒĚīĘĩ ĩĚĞīĳûĚĩħĢŧėĩ

ġĩĚČĨĞĤęţĩþ ķ

āĨĐĎĬĻĤįĊĢėİĘī 1 ĐķČĚĳċāĨĐ ûĮĤķ ĩûĩĚŧĵđķĐķČĚĳ

Ĩđ 10 ĴĜħ 0.4 TiN ĤĨČĚĩġţĞ 1,250 qC ċĨþ ĤþøĨđēĜøĩĚĞī ĖċİĶøĜŤĳûĬęþøĨĐ ĩøøĞţĩĎĬĻĤįĊĢėİ ĩĊĎĬĻČţĩþøĨĐ 0

ûČĨċùĞĩþĳĕĮĻĤ ķċŤėĩĕ SEM

1,250 qC ĳĒūĐ ķĎĳĎĳĐĬęĘđĚī ĳċāĨĐĎĬĻ 1,150 4 cm³.s^-1 ČĩĘĜ

ĞĐķĎĳĎĳĐĬęĘČ ėĩĕĒĚħøĤđ ĞīĳûĚĩħĢŧ XRD ĐĘĩø ĂĭĻþčŤĩÿ ėİĘī 1,250 qC

.4 ĂĭĻþĐŤĤęĘĩ ĎĬĻÿħċİûĞĩĘĢĐ

ĴĜħ EDX sp

ĐĳĞĜĩ 2 āĨĻĞĵĘ ġįĎďīĿ ÿħĕđĳĀ qC ĳĒūĐĳĞĜĩ ĜŀĩċĨđ ĕđķĐĵČ ČţĤķĐĵČĚĳÿĐ 5 11-12 ęĨþĕđ D ĎĬĻķċŤøĜţĩĞķ

ħĶĢŤġĤċûĜŤĤþ C ġĩĳĢČįĐĬļĤĩ ĩøÿĭþĎŀĩĶĢŤûĞĩ ĐĩùĤþāĨļĐĎĬĻĳû pectra ċĨþėĩĕ

Ęþ ĀĕĩħďĩČį

2 āĨĻĞĵĘþ ČĚĳÿĐĴČţ 58.76 :

ûĩĚŧđĤĐ ķĞŤĴĜŤĞĶĐ þøĨđ XRD ĩÿÿħĳĒūĐ ĩĘġİþùĤþ ĜĮĤđĴĜħ ĒĚħøĤđ

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ėĩĕĎĬĻ 13

ėĩĕĎĬĻ

øćßõĆäÿÖúîÙø;

ajabhat Univer

3 SEM microg

Ď 14 EDX spec

ðŘìĊę 4 ÞïĆïìĊę 8 rsity Journal;

graph ėĩûČĨċ

ctra ėĩûČĨċùĞ

: ÖøÖãćÙö – íĆî 4(8) : July – De

ċùĞĩþ ùĤþ Ti ĵ

Ğĩþ ùĤþ Ti ĵċę

îüćÙö 2555 ecember 2012

ĵċęûĩĚŧĵđķĐķČ

ęûĩĚŧĵđķĐķČĚ

ČĚĳċāĨĐĎĬĻĤįĊĢ

ĚĳċāĨĐĎĬĻĤįĊĢėİ

ĢėİĘī 1,150 qC

ėİĘī 1,150 qC

61

C

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62

ėĩĕĎĬĻ 15 SEM micrograph ėĩûČĨċùĞĩþùĤþ Ti ĵċęûĩĚŧĵđķĐķČĚĳċāĨĐĎĬĻĤįĊĢėİĘī 1,200 qC

ėĩĕĎĬĻ 16 EDX spectra ėĩûČĨċùĞĩþùĤþ Ti ĵċęûĩĚŧĵđķĐķČĚĳċāĨĐĎĬĻĤįĊĢėİĘī 1,200 qC

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Sakon Nakhon Rajabhat University Journal; 4(8) : July – December 2012 ⁶³

ėĩĕĎĬĻ 17 SEM micrograph ėĩûČĨċùĞĩþùĤþ Ti ĵċęûĩĚŧĵđķĐķČĚĳċāĨĐĎĬĻĤįĊĢėİĘī 1,250 qC

ėĩĕĎĬĻ 18 EDX spectra ėĩûČĨċùĞĩþùĤþ Ti ĵċęûĩĚŧĵđķĐķČĚĳċāĨĐĎĬĻĤįĊĢėİĘī 1,250 qC

ÿĩøėĩĕĒĚħøĤđ 13 – 18 ĳĒūĐĜĨøĠĊħġĨĊćĩĐĞīĎęĩėĩûČĨċùĞĩþĴĜħ EDX spectra ùĤþėĩûČĨċùĞĩþ ùĤþ Ti ĎĬĻûĩĚŧĵđķĐķČĚĳċāĨĐĎĬĻ 1,150-1,250 qC ĳĒūĐĳĞĜĩ 2 h ûĩĚŧĵđķĐķČĚĳċāĨĐĎĬĻ 1,150 qC ÿħĘĬûĞĩĘĢĐĩ ùĤþāĨļĐĘĩøĎĬĻġįċĒĚħĘĩĊ 150 Pm ĶĐøĩĚČĚĞÿďĩČįĶĐėĩûČĨċùĞĩþĕđĳĀĕĩħķĐĵČĚĳÿĐ ġţĞĐĎĬĻĤįĊĢėİĘī 1,200

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64

qC ĴĜħ 1,250 qC ČĚĞÿĕđĎĨļþûĩĚŧđĤĐĴĜħķĐĵČĚĳÿĐ ĶĐĤĨČĚĩġţĞĐ 39.57 : 8.32 ĴĜħ 23.70 : 8.84 atomic% ČĩĘĜŀĩċĨđ ĂĭĻþġĤċûĜŤĤþøĨđēĜøĩĚĞīĳûĚĩħĢŧ XRD

ġŀĩĢĚĨđĎĤþĴċþĎĬĻĒĚĩøĆĶĐėĩĕĒĚħøĤđ 18 ĤĩÿĳøīċÿĩøøĩĚĒĐĳĒŝŭĤĐĶĐøĚħđĞĐøĩĚČĨċġĩĚČĩĘ ùĞĩþĂĭĻþĎĤþĴċþĳĒūĐġţĞĐĒĚħøĤđĢĐĭĻþùĤþĶđĘĬċ ĵċęĎĬĻĢĜĨþÿĩøøĩĚČĨċēİŤĞīÿĨęĤĩÿĎŀĩûĞĩĘġħĤĩċķċŤķĘţĳĚĬęđĚŤĤę ċŤĞęĳøĚþĞţĩÿħĘĬēĜČţĤġĩĚĒĚħøĤđĶĐġĩĚČĨĞĤęţĩþĎĬĻÿħĐŀĩķĒ EDX ĢĚĮĤķĘţ ĤĬøĒĚħĳċĺĐĢĐĭĻþĎĬĻĤĩÿĳĒūĐķĒķċŤøĺûĮĤ ùĨļĐČĤĐĶĐøĩĚĎŀĩ EDX ĴĜħ SEM ĂĭĻþĤĩÿÿħĳøīċÿĩøøĩĚĳûĜĮĤđēīĞĳĕĮĻĤĶĢŤĐŀĩķĖĖşĩøĺĤĩÿĳĒūĐķĒķċŤ

ûĞĩĘĢĐĩùĤþāĨļĐġĩĚĎĬĻĳøīċÿĩøøĩĚĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐķĘţĳĒūĐēĜČţĤûĞĩĘĴùĺþùĤþġĩĚĳĐĮĻĤþċŤĞęķĘţ ĤĩÿĳĒĚĬęđĳĎĬęđøĨĐķċŤĳĕĚĩħĞţĩĎĬĻĤįĊĢėİĘī 1150 qC ĢĐĩĎĬĻġįċĐĨļĐČĚĞÿĕđĳĀĕĩħķĐĵČĚĳÿĐ ĢĚĮĤÿĩøēĜ XRD ĕđġĩĚĒĚħøĤđ TiN ĤęţĩþĳċĬęĞ ĴČţĎĬĻĤįĊĢėİĘī1200 qC ĴĜħ 1250 qC ĕđĎĨļþķĐĵČĚĳÿĐĴĜħûĩĚŧđĤĐ ĢĚĮĤēĜ XRD øĺĕđġĩĚĒĚħøĤđ TiN ĴĜħ TiCN ġŀĩĢĚĨđġĩĚĒĚħøĤđĎĬĻĳøīċùĭļĐĤĩÿÿħĳøīċĴđđøĚħÿĩęĤęİţĶĐĎįø Ĺ ġţĞĐ ùĤþāĨļĐġĩĚĒĚħøĤđûþÿħķĘţķċŤĴęøĳĒūĐāĨļĐùĤþġĩĚĒĚħøĤđĶċĒĚħøĤđĢĐĭĻþ ċĨþĐĨļĐÿĩøùŤĤĘİĜĐĬļĤĩÿÿħĎŀĩĶĢŤ øĩĚĎŀĩĞīÿĨęĶĐûĚĨļþČţĤķĒĜċÿŀĩĐĞĐĳĞĜĩ ĜċĒĚīĘĩĊĴøťġ ĳĕĮĻĤĒĚħĢęĨċûţĩĶāŤÿţĩęĴĜħĳĞĜĩĶĐøĩĚĎŀĩĞīÿĨę

ēĜøĩĚĞīÿĨęĴĜħùŤĤĳġĐĤĴĐħ

ÿĩøēĜøĩĚĎċĜĤþĴĜħĞīĳûĚĩħĢŧēĜøĩĚĎċĜĤþĶĐøĩĚğĭøĠĩøĜķøøĩĚøţĤČĨĞùĤþķĎĳĎĳĐĬęĘûĩĚŧĵđķĐ ķČĚċŧĵċęøĚħđĞĐøĩĚĎĩþûĞĩĘĚŤĤĐĵċęĶāŤĵĜĢħķĎĳĎĳĐĬęĘđĚīġįĎďīĿ 99.7% ĳĒūĐ substrate ĴĜŤĞĶāŤûĩĚŧđĤĐ ĤħČĤĘĴĜħķĐĵČĚĳÿĐĤħČĤĘÿĩøĴøťġĤħĂīĎīĜĬĐĴĜħĴĤĘĵĘĳĐĬęČĩĘĜŀĩċĨđ ġĩĘĩĚčġĚįĒēĜøĩĚĞīÿĨęĴĜħ ùŤĤĳġĐĤĴĐħġŀĩĢĚĨđēİŤĎĬĻÿħğĭøĠĩĳøĬĻęĞøĨđĳĚĮĻĤþĐĬļĢĚĮĤĶĐĴĐĞĳċĬęĞøĨĐĐĬļ ķċŤċĨþČţĤķĒĐĬļ

1. ġĚįĒēĜøĩĚĞīÿĨę

1.1 øĜķøøĩĚøţĤČĨĞùĤþķĎĳĎĳĐĬęĘûĩĚŧĵđķĐķČĚċŧĵċęøĚħđĞĐøĩĚĎĩþûĞĩĘĚŤĤĐ ĵċęĶāŤĴøťġēġĘ ĚħĢĞţĩþĴĤĘĵĘĳĐĬęĴĜħĤħĂīĎīĜĬĐċŤĞęĤĨČĚĩûþČĨĞ 10 : 0.4 cm³.s^-1 ÿħĳøīċùĭļĐķĎĳĎĳĐĬęĘûĩĚŧĵđķĐķČĚċŧ (TiCN) ĎĬĻ ĤįĊĢėİĘī 1,200 qC ùĭļĐķĒ ĵċęĘĬøĜķøøĩĚøţĤČĨĞ ûĮĤûĩĚŧđĤĐĤħČĤĘÿĩøøĩĚġĜĩęČĨĞùĤþĴøťġĤħĂīĎīĜĬĐĴĜħ ķĐĵČĚĳÿĐĤħČĤĘÿĩøøĩĚġĜĩęČĨĞĴøťġĴĤĘĵĘĳĐĬę ÿħĳøīċøĩĚĴĕĚţĳùŤĩġİţĵûĚþġĚŤĩþùĤþķĎĳĎĳĐĬęĘĴĜŤĞĚĞĘČĨĞøĨĐ ĳĒūĐġĩĚĒĚħøĤđċĨþøĜţĩĞùĭļĐ ĐĤøÿĩøĐĨļĐęĨþĳøīċġĩĚĒĚħøĤđķĎĳĎĳĐĬęĘķĐķČĚċŧ (TiN) ùĭļĐĤĬøċŤĞę

2.2 ķĎĳĎĳĐĬęĘķĐķČĚċŧĘĬĵûĚþġĚŤĩþĳĒūĐ Cubic ĘĬ space group ĳĒūĐ Fm3m ġţĞĐġĩĚĒĚħøĤđ ķĎĳĎĳĐĬęĘûĩĚŧķđċŧøĺĘĬĵûĚþġĚŤĩþĳĒūĐ Cubic ĘĬ space group Fm3m (02-0942) ġŀĩĢĚĨđĵûĚþġĚŤĩþġĩĚĒĚħøĤđ ûĩĚŧĵđķĐķČĚċŧĳĒūĐ Cubic ĘĬ space group Fm3m ĳāţĐĳċĬęĞøĨĐ ÿħĳĢĺĐĞţĩĵûĚþġĚŤĩþùĤþġĩĚĒĚħøĤđ TiN, TiC ĴĜħ TiCN ÿħĘĬĵûĚþġĚŤĩþûĜŤĩęøĨĐ đĩþûĚĨļþøĺĳĚĬęøĵûĚþġĚŤĩþĴđđĐĬļĞţĩ Sodium Chloride Structure ĵċę TiN ĘĬ ĵĤøĩġĳøīċĘĩøøĞţĩ TiC ĴĜħ TiCN ĳĐĮĻĤþÿĩøĘĬûţĩĕĜĨþþĩĐĤīġĚħČĻŀĩøĞţĩ ċĨþĐĨļĐûĩĚŧĵđķĐķČĚĳċāĨĐĎĬĻĤįĊĢėİĘī 1,150 qC ÿĭþĕđĴČţ TiN ĳĎţĩĐĨļĐ

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Sakon Nakhon Rajabhat University Journal; 4(8) : July – December 2012 ⁶⁵

2.3 ûĞĩĘĴùĺþùĤþġĩĚČĨĞĤęţĩþĎĬĻĎŀĩûĩĚŧĵđķĐķČĚĳċāĨĐ ĳĕīĻĘùĭļĐĘĩøĎĬĻġįċčĭþ 3.2 ĳĎţĩùĤþġĩĚČĨļþČŤĐ øĺ ĳĐĮĻĤþĘĩÿĩøøĩĚĳøīċĳĖġùĤþ TiN ĴĜħ TiCN đĐĕĮļĐēīĞĂĭĻþĴġċþēĜĵċę XRD ĴĜħ EDX

2.4 ġĩĚĒĚħøĤđĎĬĻĳøīċùĭļĐđĐēīĞùĤþ substrate ÿĩøēĜùĤþ SEM ÿħĘĬûĞĩĘùĚįùĚħûţĤĐùŤĩþĘĩøĒø ûĜįĘċŤĞęûĞĩĘĢĜĩøĢĜĩęùĤþ clusters ĂĭĻþÿħĳĒūĐĕĩĚĩĘīĳČĤĚŧĢĐĭĻþĎĬĻÿħĎŀĩĶĢŤĳøīċûĞĩĘĳġĬęċĎĩĐĘĩøùĭļĐĳĘĮĻĤ ĐŀĩķĒĶāŤþĩĐĂĭĻþķĘţĳøīċēĜċĬČţĤĤĩęįøĩĚĶāŤþĩĐùĤþġĩĚċĨþøĜţĩĞĐĬļ

2. ùŤĤĳġĐĤĴĐħ

2.1 ûĞĚÿħĎŀĩĶĢŤġĩĚĒĚħøĤđĘĬûĞĩĘùĚįùĚħĐŤĤęĜþĳĕĮĻĤĜċûĞĩĘĳġĬęċĎĩĐĳĞĜĩĐŀĩķĒĶāŤþĩĐĵċę ĤĩÿÿħĜċĳĞĜĩĶĐøĩĚûĩĚŧĵđķĐķČĚĳċāĨĐ ĢĚĮĤĒĚĨđĤĨČĚĩġţĞĐùĤþĴøťġēġĘ ĳĒūĐČŤĐ

2.2 ûĞĚÿħĎŀĩ AFM ĳĕĮĻĤċİĕĮļĐēīĞĶĢŤĜħĳĤĬęċ

2.3 ĜċĳĞĜĩĶĐøĩĚĎŀĩĐŤĤęĜþĳĕĮĻĤĒĚħĢęĨċġĩĚČĨļþČŤĐ

ĳĤøġĩĚĤŤĩþĤīþ

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Materials Letters. 35, 344–350.

Rebelo de Figueiredo, M., Neidhardt, J., Kaindl, R., Reiter, M., Tessadri, R. and Mitterer, C. (2008). Formation mechanisms of low-friction tribo-layers on arc –evaporated TiC1-x Nx hard coating. Wear. 265, 525- 532.

Sopunna, K., Thongtem, T., McNallan, M. and Thongtem S. (2004). Surface Modification of J-TiAl Alloys by the Nitridation. Surface Science. 566-568, 810-815.

Sopunna, K., Thongtem, T., McNallan, M. and Thongtem, S. (2006). Formation of titanium nitride on J- TiAl alloys by the direct metal-gas reaction. Journal of Materials Science. 41, 4654-4662.

Wicks, C.E. and Block, F.E.(1963). Therm. Prop. 65 Elements-Their Oxides, Halides, Carbides

&Nitrides. Washington, U.S. Gov. Print. Office, 13&124.

Zhao, B., Sun, J., Wu, J. S. and Yuan, Z. X.(2002). Gas nitriding behavior of TiAl based alloys in an ammonia atmosphere. Scipta Mater. 6, 581.

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