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Effect of in SITU DC and PDC substrate bias cleaning process on TiN coating adhesion in PVD system.

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Academic year: 2017

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TABLE TITLE Table 2.1 Examples of deposition techniques to improve TiN coating properties
FIGURE TITLE Illustration of external cleaning, in situ cleaning and coating deposition
Figure 4.8 Comparison of coating adhesion and crystallite size at in situ cleaning 63
Figure 2.1: Illustration of external cleaning, in situ cleaning and coating deposition of PVD processes
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Effect of in SITU DC and PDC substrate bias cleaning process on TiN coating adhesion in PVD system.

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