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1393u=DU@=D'h}QWC}Q}Otw`}=vY|UOvyt 123"X'1/1|xQ=tW'301|xQwO OriginalArticle

V=WDe= x@ p=vo}U C@Uv u}wv XN=W |x=Q=

sy x@ xDU@=w |=yMU=B |=Q@ xQ}eDtOvJ

Q=}Wv=O|Q}W@ |Oyt Q=}O=DU= |Q}t= u}ULQ}t=

OWQ= T=vWQ |r}rH O}Ht Oy=W x=oWv=O '`}=vY |UOvyt xwQo

VwQ u}= hOy "CU= Ov}=Qi =} pwYLt C}i}m V}=Ri= QO =Q=m w QF-wt |WwQ '|Jwo=D VwQ MU=B Q}eDt xm |}xvwox@ CU= MU=B Q}eDt Q=Okt Q@ V=WDe= pt=wa Q}F-=D u=R}t Vy=m p}rLD w x}RHD w |UQQ@ Qw_vtx@ |Jwo=D "OwW sw=kt V=WDe= pt=wa C=Q}}eD x@ C@Uv u}wv XN=W l} xar=]t u}= QO "OQm |iQat =Q V=WDe= x@ p=vo}U C@Uv 'MU=B Q}eDt

|=yQ}eDt |=Q@ Ov}=Qi |x}L=v CL=Ut w¹|UO}rk= |xrY=i T=U=Q@ 'V=WDe= x@ p=vo}U

|=Q@ CU= |Q=}at sy xm CU= u=vJ xOWx=Q= Q=}at "OwW|t x=Q= sy x@ xDU@=w MU=B C=Oy=Wt C=Q}}eD u=R}t |Q}oxR=Ov= |=Q@ CU= |Q=}at sy w 'hOy =D xrY=i |Q}oxR=Ov=

|O=yvW}B VwQ "=yQ}eDt u}@ Tv=}Q=wm R= |W=v w Q}eDt Qy R= |W=v C=Q}}eD Q@ ptDWt

"CU= xOW xO=O u=Wv |O=yvW}B VwQ |}=Q=m w 'xDiQo Q=Qk |UQQ@ OQwt p=Ft xU QO

bashiri@shahed.ac.ir amiri@shahed.ac.ir mjalili@shahed.ac.ir

'Ov}=Qi |x}L=v '|UO}rk= |xrY=i 'V=WDe= x@ p=vo}U C@Uv %|O}rm u=oS=w

"sy x@ xDU@=w |=yMU=B '|Jwo=D VwQ

xtOkt "1

|=Q@ QDW}@ Q=Okt u}=Q@=v@ 'OwW|t QDQ=O}=B sDU}U l} x@ |@=}CUO x@ QHvt xm

"CU= ?wr]t^SNR CQwYx@ u=wD|t =Q C@Uv u}= OW=@ xv}y@ |tU= `wv R= MU=B Q}eDt xm |Dr=L QO Q=Okt^tw Q=t}D Qy |=Q@ s=ⁱMU=B Q=Okt^yi'x]@=Q u}= QO "O=O V}=tv 2 |x]@=Q C=Oy=Wt Q=}at h=QLv= u=R}t^S "CU= MU=B Q}eDt |=Q@ xOW xDiQo Q_v QO hOy

"OyO|t u=Wv =Q C=Oy=Wt pm O=OaDⁿw CU=

SNR = 10log (MSD) = 10^log 1

n X

i

(yi t)²

!

=

10^{logS2+ (y t)2 (}2⁾

hOy x@ |m}ORv w C=Q}}eD u=R}t pt=a wO^SNRC@Uv '2 |x]@=Q x@ xHwD =@

Qo= xm O}W=@ xDW=O xHwD "OyO|t Q=Qk xHwD OQwt Ov}=Qi |}=Q=m |UQQ@ Qw_vtx@ =Q

=Q C=Oy=Wt Tv=}Q=w \ki 2 |x]@=Q x=ov; 'OwW xDiQo Q_v QO ^{y = t} Q=Okt 3 |x]@=Q CQwYx@^SNR C@Uv R= |O}OH xNUv u}=Q@=v@ ^[2]"OQ}o|t Q_v QO xOW xDiQo Q_v QO hOy Q=Okt u=wvax@ QiY Q=Okt x]@=Q u}= QO "OwW|t x=Q=

"CU=

SNR = 10log (MSD) =10^log_S^y2₂ ⁽3⁾

uwvm=D OW |iQat^[1]|Jwo=D \UwD 1980 p=U QO Q=@u}DUNv xm²Q=O}=B |L=Q]

"CU= xOW =QH= R}t;C}kiwt Qw]x@ |DavY CqwYLt w p=Ut R= |Q=}U@ |wQ 'O=O Q=Qk |UQQ@ OQwt sDU}U `wv wO QO =Q³QDt=Q=B Q=O}=B |L=Q] |xrUt |Jwo=D

=DU}= sDU}U QO "MU=B p=vo}U =}wB |=ysDU}U w MU=BlD =DU}= |=ysDU}U w MU=B Q}eDt u}@ =}wB sDU}U QO xm |r=L QO CU= |tm Q=Okt l} MU=B Q}eDt

"1 pmW CU= Q=QkQ@ x]@=Q l} p=vo}U pt=a u}}aD |wLvx@ pQDvm pt=wa Kw]U =D CU= u; Q@ |aU QDt=Q=B Q=O}=B |L=Q] QO

|Q}PBQ}F-=Du}QDsmV=WDe=pt=wapQDvmp@=kQ}ept=wax@C@UvpwYLtxmOwW swyit R= xDiQoQ@ =Q V=WDe= x@ p=vo}U C@Uv |Jwo=D Qw_vtu}O@ "OW=@ xDW=O =Q pw=OH QO OwHwt |=yQ=t}D |UQQ@ =@ C@Uv u}= "OQm |iQat 1 |x]@=Q u=}R `@=D uDW=O w hOy Q=Okt x@ |m}ORv u=R}t |x}=B Q@ =Q =yu; |}=Q=m u=R}t 'V}=tR; |L=Q]

"Ovm|t |Q}oxR=Ov= C=Q}}eD Q=Okt u}QDsm

SNR = 10^{log (MSD) (}1⁾

C=i=QLv= `@Qt u}ov=}t^MSDw 'V=WDe= x@ p=vo}U C@Uv^SNR'1 |x]@=Q QO CU= sDU}U uwQO C=Q}}eD u=R}t uOQm xv}tm |vatx@ C@Uv u}= uOQm xv}W}@ "CU=

pwUt xOvU}wv

"1390 11 8 VQ}PB '1390 10 25 x}LqY= '1390 7 6 Ci=}QO %M}Q=D

"""V=WDe=x@p=vo}UC@Uvu}wvXN=W|x=Q=

MU=B Q}eDt xm |v=tR |Jwo=D VwQ xm OvO=O u=Wv u=v; ^[5]"OwW|t =yV}=tR;

CUQO=v MU=B x@ QHvt ?re= OW=@ pQDvm pt=wa =@ |]NQ}e |x]@=Q |=Q=O

[6]"OwW|t R= xO=iDU= =@ |]NQ}e Cr=L QO |Jwo=D |xrUt |=Q@ Q=O}=B |L=Q] OQm}wQ

|=yQ}eDt pwL Qwr}D |QU R= xO=iDU= =@ hOy `@=D 'Qw_vtu}O@<sup>[8w7]</sup>"OW x=Q= u=}R `@=D

=@ |r=Ut QO Q=O}=B |L=Q] w |Jwo=D |xrUt u}vJty "OW xO=O \U@ xrUt

[9^]"OW |UQQ@ xDUUo |=yQ}eDt QO^RPDC=ar=]tR=pY=L|=yxO=Op}rLD|=Q@|Q=OwtvVwQwOu=QoVywSB w |[Qi |m} xm 'p=Ft wO =@ TBU w^[10]OvOQm x=Q= MU=B p=vo}U |=ysDU}U

|=}wB^SNRVwQ Q@ u; |QDQ@ w xOW x=Q= |=yVwQ CLY 'CU= |ak=w |Qo}O

"OvO=O u=Wv =Q |Jwo=D

|Jwo=D |xrUt |UQQ@ |=Q@ uw}UQoQ Q@ |vD@t *|]N pOt l} u}kkLt Qo}O R= xiOyOvJ |=ysDU}U QO^SNRC@Uv R= xO=iDU=^[11]'OvOQm x=Q= =}wB Cr=L QO O}OH |OQm}wQ u=}R `@=D R= xO=iDU= =@^[12]'OvO=O Q=Qk |UQQ@ OQwt =Q =}wB p=Ut

`@=D l} R}v w^[13]'OvOQm x=Q= xNU=BOvJ Cr=L QO |Jwo=D |xrUt |UQQ@ |=Q@

|t}Ok |=yVwQ x@ C@Uv xm OvOQm x=Q= |Jwo=D |xrUt |=Q@ O}OH C}@wr]t

[14]"CW=OQ@QO |QDy@ G}=Dv VwQ l} '|Jwo=D VwQ R= |Q}oxR=Ov= |=ysDU}U QO C=Q}}eD Vy=m |UQQ@ =@

4T}UB=D VwQ R= xO=iDU= =@ u}vJty^[15]"OW x=Q= Qw_vt u}= |=Q@ Q=O}=B |L=Q]

G}=Dv^[16]"CiQo Q=Qk |UQQ@ OQwt |Jwo=D |xrUt |Q}os}tYD |=yl}vmD R=

[16]"CU=^SNRR= xO=iDU= =@ xU}=kt QO |O=yvW}B VwQ |}=Q=m Qou=Wv xrY=L VwQ l} 'O}Q@D |R=Ux}@W VwQ w C}@wr]t `@=D swyit R= xO=iDU= =@ u}vJty VwQ C}Rt^[17]"OW x=Q= xNU=BOvJ Cr=L QO |Jwo=D |xrUt |=Q@ |R=Uxv}y@

pQDvm pt=wa Kw]U u=}t xDUw}B pY=wi |wHwCUH C}r@=k R= |Q=OQwNQ@ QwmPt

"CU=

u; QO xm^[18]OvO=O Q=Qk |UQQ@ OQwt =Q MU=B p=vo}U sDU}U l} u}kkLt u; |UQQ@ CLD sDU}U syt |oS}w "CW=O xOyax@ =Q p=vo}U pt=a Vkv u=tR Q@ |vD@t |OQm}wQ u}vJty "OvDU}v sy R= pkDUt p=vo}U pt=a Kw]U xm CU=

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"CU= xDUw}B Kw]U =@ pQDvm pt=wa uDiQo Q_v QO |}=v=wD u; |oS}w xm^[19]OW x=Q=

xrUt |UQQ@ |=Q@ |WwQ |}=tv C}@wr]t `@=D |x}=B Q@ 'R}v |Oa@ C=ar=]t QO x=Q= OW=@ |]N Q}e MU=B Q}eDt w p=vo}U pt=a u=}t |x]@=Q xm |v=tR

[20^]"OW

6=yxO=O |WWwB p}rLD VwQ R= xO=iDU= =@ =Q OwN |x}wQ R}v u=Q=mty w nv=D

|O=yvW}BOQm}wQu}vJty"OQ=O=QxNU=BOvJp=Utp}rLDC}r@=kxm^[21]OvOQmx=Q=

MU=B Q}eDt w p=vo}U pt=a u=}t |x]@=Q uOw@|]N ZQi x@ |R=}v =yu; \UwD

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|v=tR '|Jwo=D V=WDe= x@ p=vo}U C@Uv XN=W |=yC}OwOLt R= |m}

p=-wU Cr=L u}= QO "s}wW|t xH=wt xNU=BOvJ |xrUt l} =@ xm Ovm|t RwQ@

"CU= MU=B |=yQ}eDt V=WDe= x@ p=vo}U |=yC@Uv `}tHD |ovwoJ |U=U=

uDiQo Q_v QO sOa pmWt =@ 'V=WDe= x@ p=vo}U |=yC@Uv `}tHD pmWt Q@ xwqa

[22]|DQw@=Qm=J w |Qwo 'p=Ft |=Q@ "s}DUy wQx@wQ R}v MU=B |=yQ}eDt u=}t Tv=}Q=wm

"OvOQm xO=iDU= O}OH MU=B l} uDN=U |=Q@⁷|rY= |=yxir-wt p}rLDwx}RHD R=

R= |W=v |rY= |xir-wt xm^8MRPI xNU=BOvJ |}=QH= XN=W |iQat =@ u=v;

x@ s=Ok= 'CU= xOWOQ=Ov=DU= V=WDe= x@ p=vo}U |=yC@Uv |rY= |=yQ}eDt

=}wB w =DU}= |=ysDU}U "1 pmW

C@Uv 'OW=@ xv}y@ xv}W}@ w xv}y@ xv}tm `wv R= MU=B xm |Dr=L QO u}vJty

%OwW|t h}QaD Q}R CQwYx@ ?}DQDx@ V=WDe= x@ p=vo}U

SNR = 10^log"1

n Xn i=1y_i²

#

(4⁾

SNR = 10^log"1

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ni

X

i=1 y1²_i

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=DU}= Cr=L QO xrUt |R=Uxv}y@ |=Q@ |}xrLQtwO |OQm}wQ |Jwo=D 'C}=yv QO

|Lw]U OwW|t |aU pw= s=o QO xm CU= |U=U= s=o wO pt=W VwQ u}= "OQm x=Q=

"OwW^SNRQ=Okt u}QDW}@ uOt; CUO x@ ?Hwt xm OwW ?=NDv= pQDvm pt=wa R=

hOy Q=Okt x@ umtt OL =D MU=B Q}eDt Q=Okt OwW|t |aU swO s=o QO TBU

"OwW l}ORv

"OQm |iQat =Q^[3]sy Q@ Owta |=yx}=Q; |Jwo=D 'Ov}=Qi p}rLD w x}RHD Qw_vtx@

|vwQ}@ |x}=Q; w pQDvm pt=wa |xOvQ}oQ@QO |vwQO |x}=Q; pt=W syQ@ Owta |x}=Q;

`]=kD R= pY=L Kw]U s=tD QO xm |Qw]x@ CU= V=WDe= pt=wa |xOvQ}oQ@QO

"OvwW|t Q=QmD =yV}=tR; '=yx}=Q; u}=

MU=BlD|=ysDU}U=Q=DU}=|=ysDU}U'|Jwo=D|Q=Pos=vR=O=kDv==@u}kkLt u=v; O=kDv= |=v@t^[4]"OvO}t=v MU=B p=vo}U |=ysDU}U =Q =}wB |=ysDU}U w Q=m x@ u=tR =@ \@DQt |=ysDU}U |=Q@ ,=twta =}wB w =DU}= u}w=va xm CU= u}=

u=tR =@ |]=@DQ= ,=twRr =}wB w =DU}= |=ysDU}U R= l}I}y xm |r=L QO OvwQ|t

"OvQ=Ov

|vwQ}@ |x}=Q; w pQDvm pt=wa |=Q@ |vwQO |x}=Q; R= xO=iDU= 'u}kkLt Qw=@ x@

|xv}Ry w O=OaD V}=Ri= ?Hwt w CU= |QwQ[Q}e ?re= V=WDe= pt=wa |=Q@

"""w|Q}t=u}ULQ}t='|Q}W@|Oyt _{B =}w^{A = (xA; yA)}C=YNWt =@ x]kv wO |Q}oxR=Ov= OYk Qo= "OwW|t u=}@ =Q x]kv wO u}= u=}t |UO}rk= |xrY=i 6 |x]@=Q 's}W=@ xDW=O =Q^{(xB; yB)}

"Ovm|t

ud =p

(xA xB)²+ (yA yB)² (6⁾

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Ov}=Qi |x}L=v "2"2

|wQ}B xQ}eDtOvJ `}RwD R= C=Oy=Wt xm |Dr=L QO '¹³Ov}=Qi |}=Q=m |x@U=Lt |=Q@

|Q=OQ@^{x1; x2; :::; xn}xm O}vm ZQi "OwW|t xO=iDU= Ov}=Qi |x}L=v R= 'Ovvm

"Ovm|t |wQ}B xQ}eDt p=tQv `}RwD l} R= xm CU=ⁿ |xR=Ov= =@ C=Oy=Wt R=

n u}ov=}t w CU= 1 |xR=Ov= =@ |Q=OQ@ xm ^x =@ =Q =yxO=O u}= u}ov=}t Tv=}Q=w T}QD=t "s}yO|t u=Wv 'OQ}o|t Q@QO =Q |i}m |xYNWtR= xOy=Wt

|xOvQ}oQ@QO w CU= xR=Ov= =@ |U}QD=t xm C=Oy=Wt u}= Tv=}Q=wm xO=O xO=O u=Wv ^S =@ CU= |i}m |xYNWt Tv=}Q=wm w Tv=}Q=w Q}O=kt

"OwW|t CQwYx@ C=Oy=Wt u}= |=Q@ Ov}=Qi |x}L=v CQwY u}= QO OW=@ ⁼2 Qo=

QO |[}@ |}=yv |xrO=at^[23]"O};|t CUO x@ 7 |x]@=Q R= xm CU= |[}@ l}

"CU= xOW xOQw; hr= CUw}B QO 2 hr= |x]@=Q

(x )⁰S ¹(x ) ²_(;) (7⁾

=m QwPHt `}RwD R= OYQO 100 <sup>(</sup>1 <sup>)</sup>=@ CU= Q@=Q@<sup>2</sup>(;)'7 |x]@=Q QO xQ}eDtwO p=tQv `}RwD R= C=Oy=Wt R= |}xDUO xm s}vm ZQi Qo= "|O=R; xHQO=@

Oy=wN 2 pmW j@=]t C=Oy=Wt R= xDUO u}= |=Q@ Ov}=Qi |x}L=v 'Ovvm|t |wQ}B

"CU= xOW xO=O KQW Ov}=Qi x}L=v CL=Ut x@U=Lt x}wQ hr= CUw}B QO "Ow@

R}v Ov}=Qi |x}L=v CL=Ut OwW QDW}@ C=Oy=Wt u}@ Tv=}Q=w u=R}t xJQy u=R}t |UQQ@ |=Q@ ?U=vt |Q=}at Ov=wD|t Ov}=Qi |x}L=v u}=Q@=v@ "OwW|t QDnQR@

*|[}@ CyH Q@ R}v C=Oy=Wt u=}t Tv=}Q=wm "OW=@ u}ov=}t pwL C=Oy=Wt C=Q}}eD

"OQ=Po|t Q}F-=D 2 pmW

|O=yvW}B OQm}wQ "3"2 u}vJty w |i}m |=yxYNWt C=Q}}eD QDW}@ xJQy Vy=m |Jwo=D OQm}wQ R= hOy R= xar=]t u}= QO 'Qw_vt u}= |=Q@ "CU= hOy Q=Okt x@ =yu; QDW}@ xJQy |m}ORv

"xQ}eDtwO p=tQv `}RwD l} R= C=Oy=Wt R= |Q=OQ@ |=Q@ Ov}=Qi |x}L=v "2 pmW

x@ =@ xm CU= u; jwi VwQ O=Q}= "OvOQm x}rw= V=WDe= x@ p=vo}U |=yC@Uv `}tHD u}@ R= xrUt C=aq]= R= |WN@ '|rY= |=yxir-wt p}rLD w x}RHD l}vmD uDU@ Q=m u=wD|t =Q xv=oOvJ |R=Uxv}y@ p=Ut QO xDiQ Q=m x@ |=yOQm}wQ |rm Qw]x@ "OwQ|t

9C}@wr]t `@=D Q@ |vD@t |=yVwQ pw= |xDUO "OQm |Ov@s}UkD xDUO Q=yJ QO Tv=}Q=wm w Tv=}Q=w R= uOQmv xO=iDU= '=yVwQ xDUO u}= Q@ xOQ=w |rY= O=Q}= "CU=

QO "CU=¹⁰u=}R `@=D Q@ |vD@t |=yVwQ pt=W swO |xDUO "CU=yxO=O u=}t R= xDUO u}= C}Rt "OwW|t h}QaD xrUt |=Q@ ?U=vt u=}R `@=D l} =yVwQ u}=

pt=W swU |xDUO "CU=yxO=O u=}t Tv=}Q=wm w Tv=}Q=w R= s-=wD |xO=iDU= =yVwQ

|Q}os}tYD |=yVwQ ?r=k QO =yVwQ u}= "CU=¹¹C}wrw= Q@ |vD@t |=yVwQ u=}t Tv=}Q=w =yVwQ R= xDUO u}= QO xJQo= "OvQ}o|t Q=Qk¹²xv=oOvJ |=yQ=}at =@

=yxO=O u=}t Tv=}Q=wm uDiQo Q_v QO sOa u=vJty 'OwW|t xDiQo Q_v QO C=Oy=Wt

|vD@t |=yVwQ |xOvQ}oQ@QO sQ=yJ |xDUO "CU= KQ]t |U=U= O=Q}= l} u=wvax@

'OW QmP xm u=vJ 'R}v =yVwQ u}= Q@ xOQ=w O=Q}= u}QDsyt "CU= |Jwo=D VwQ Q@

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|x=Q= w `}tHD x@ QO=k =yxO=O u=}t Tv=}Q=wm uDiQo Q_v QO =@ u=tRsy XN=W p=Ut p}rLD w x}RHD Q=m u}=Q@=v@ "CU=yMU=B |@=}RQ= Qw_vtx@ OL=w |YN=W Tv=}Q=wm ?r=k QO xrUt C=aq]= xm u; uwO@ Ovm|t QDxO=U =Q xNU=BOvJ

|O=yvW}B XN=W xm Cio u=wD|t C}=yv QO "OwQ@ u}@ R= MU=B |=yQ}eDt u}@

u=}t Tv=}Q=wm w Tv=}Q=w |oOvm=QB 'hOy Q=Okt R= xrY=i uDiQo Q_v QO =@

|=yVwQ Q}=U x@ R=}v sOa "CU= xNU=BOvJ p=Ut |=Q@ =Q=m |WwQ '=yxO=O uDiQ CUO R= ?@U xm |rY= |=yxir-wt p}rLD w x}RHD Ovv=t |R=U=Dm}

|=yC}Rt R= |UOvy u}ov=}t =} OwW|t xrUt |x}rw= C=aq]= R= |WN@

?@U |UOvy u}ov=}t R= xO=iDU= xm O}W=@ xDW=O xHwD "CU= |O=yvW}B VwQ

|DL |xR=Ov= x@ C@Uv |UOvy u}ov=}t Q=Okt xOW`}tHD XN=W xm OwW|t u}= "OQ}o@ OwN x@ |tm Q=}U@ Q=Okt OwW T=UL Q=}U@ ?U=vt=v MU=B Q}eDt l}

xDW=O |@U=vt Q=}U@ Q}O=kt MU=B |=yQ}eDt Q}=U CU= umtt xm CU= |r=L QO

"OvW=@

xO=O K}[wD |O=yvW}B VwQ 2 VN@ QO xm CU= u=vJ Q=DWwv u}= Q=DN=U

|R=Ux}@W p=Ft xU |wQ |O=yvW}B VwQ |}=Q=m 3 VN@ QO TBU "OwW|t w |Q}oxH}Dv C}=yv QO "OQ}o|t Q=Qk |UQQ@ OQwt `w[wt C=}@O= R= xDiQoQ@ w xOW

"CU= xOW x=Q= 4 VN@ QO |D; |=yO=yvW}B

|O=yvW}B VwQ "2

hOy Q=Okt x@ |m}ORv pt=a wO CU= sRq |Jwo=D |xrUt |UQQ@ Qw_vtx@

|iQat =@ =Q pt=a wO u}= |Jwo=D "OQ}o Q=Qk Q_v Ot C=Oy=Wt C=Q}}eD u=R}t w

|O=yvW}B VwQ QO "O=O Q=Qk xHwD OQwt OwN |}xrLQtwO OQm}wQ w^SNRC@Uv u}= uDiQo Q_v QO |=Q@ Ov}=Qi |x}L=v w |UO}rk= |xrY=i XN=W wO R= Q=DWwv u}=

"OwW|t xO=iDU= pt=a wO

|UO}rk= |xrY=i "1"2

|=yVwQ R= |Q=}U@ QO xm xrY=i VHvU |=Q@ CU= |Q=}at |UO}rk= |xrY=i

|Q}oxR=Ov= XNWt |x]kv wO u=}t |xrY=i VwQ u}= QO "OQ=O OQ@Q=m |[=}Q

"""V=WDe=x@p=vo}UC@Uvu}wvXN=W|x=Q=

uOQm `tH |=Q@ |rmWt 'Ov=xOW |Ov@T=}kt 1 =D 0 Q}O=kt u}@ w OL=w uwO@⁰

%CU= |O=yvW}B XN=W hQat 11 |x]@=Q "O};|tv OwHw x@ =yu;

MSN = 10^{log(ud0+ 0) (}11⁾

|t=ovy x]@=Q u}= |=Q@ |v}Ro}=H u=wvax@ xm CU= 2 |x]@=Q x}@W x]@=Q u}=

R}v QDV}B xm u=vJ "OwW|t O=yvW}B s}W=@ wQx@wQ xNU=BOvJ |xrUt l} =@ xm Tv=}Q=wm uDiQo Q_v QO =@ =Q MU=B |=yQ}eDt `}tHD |}=v=wD 11 |x]@=Q 'OW u=wva

"OQ=O xrUt C=aq]= uO=O CUO R= uwO@ =yu; u}@

xv}y@ |tU= `wv R= MU=B |=yQ}eDt |=Q@ =yvD 11 |x]@=Q xm O}W=@ xDW=O xHwD

|x@U=Lt xv}y@ xv}W}@ w xv}y@ xv}tm `wv R= |=yQ}eDt |=Q@ "CU= xO=iDU= p@=k QO<sup>(T )</sup>hOy Q=Okt =Q}R CU}v umtt 6 |x]@=Q R= xO=iDU= =@ |UO}rk= |xrY=i CtU QO `HQt |x]kv l} R= xO=iDU= s=ovy u}= QO "CU= C}=yv|@ 6 |x]@=Q O=yvW}B C}i}m V}=Ri= QO C@Ft pt=a l} u=wvax@ xrY=i h}QaD w hOy Qo}O u=wvax@ =Q QiY u=wD|t 'CU= xv}y@ xv}W}@ `wv R= xrUt Qo= p=Ft |=Q@ "OwW|t Q}eDt 'hOy Q=Okt R= uDiQo xrY=i =@ CQwY u}= QO "CiQo Q_v QO hOy Q=Okt C@Ft pt=a l} Cr=L u}= QO xrY=i xH}Dv QO "Ovm|t CmQL⁺¹CtU x@ MU=B

"OQm 11 |x]@=Q OQ=w =Q u; Tma u=wD|t w CU=

"s}Qw;|t CUO x@^MSNQ}O=kt x@ xHwD =@ =Q pQDvm pt=wa u}ov=}t C=QF= "4 s=o K]U Q=Okt u=wvax@ Ovm xv}W}@ =Q^MSNQ=Okt xm |L]U |rQDvm pt=a Qy |=Q@

Q=Okt uOQm xv}W}@ xm O}W=@ xDW=O xHwD "OwW|t ?=NDv= |rQDvm pt=a |=Q@ xv}y@

"CU=⁰w^ud0?wr]t=v pt=wa Q}O=kt uOQm xv}tm =@ pO=at^MSN

|OOa p=Ft "3

"CU= xDiQo Q=Qk |UQQ@ OQwt p=Ft xU 'xOW QmP VwQ |}=Q=m uO=O u=Wv Qw_vtx@

"CU= `w[wt C=}@O= R= xDiQoQ@ swU w swO p=Ft w xOW |R=Ux}@W pw= p=Ft

|=Q@ "OQ=O Q=Qk^cw^b'^a|rQDvm pt=a xU Q}F-=D CLD |Ov}=Qi xm O}vm ZQi "1 p=Ft xOW xDiQo Q_v QO 3 w 2 ?}DQDx@ hOy Q}O=kt =@^Y2w^Y1MU=B Q}eDt wO Ov}=Qi u}=

QO MU=B |=yQ}eDt Q}O=kt 1 pwOH QO "Ovvm|t |wQ}B xQ}eDtwO p=tQv `}RwD R= xm

|x}L=v R= w hOy R= u}ov=}t |xrY=i Q=Okt |Q}oxR=Ov= |=Q@ |UO}rk= |xrY=i VwQ C}Rt "OwW|t xO=iDU= MU=B |=yQ}eDt C=Q}}eD Q=Okt |Q}oxR=Ov= |=Q@ Ov}=Qi w |UO}rk= |xrY=i |=Q@ xOW K}QWD \@=wQ x@ xHwD =@ xm CU= u; QO |O=yvW}B

|=ys=o "OQ}o|t Q@ QO R}v =Q =yMU=B Tv=}Q=wm 'Tv=}Q=w Q@ xwqa 'Ov}=Qi |x}L=v

%R= Ov=CQ=@a |O=yvW}B OQm}wQ xO=iDU= =@ =Q Q=t}D Qy QO hOy Q=Okt R= C=Oy=Wt u}ov=}t |UO}rk= |xrY=i "1 s=o OQ=Ov=DU= 8 |x]@=Q R= xO=iDU= =@ =Q xrY=i u}= TBU "O}vm |Q}oxR=Ov= 6 |x]@=Q R=

"O}vm

ud⁰= ud ud^min

udmax udmin (8⁾

|UO}rk= |xrY=i u}QDW}@ w u}QDsm ?}DQDx@^udmax w^udmin '8 |x]@=Q QO

ud |xrY=i xOW OQ=Ov=DU= Q=Okt R}v ^ud0 &CU=yQ=t}D u=}t QO xOWx@U=Lt

"CU=

R= xO=iDU= =@ =Q Q=t}D Qy QO C=Oy=Wt R= pY=L Ov}=Qi |x}L=v CL=Ut "2 s=o Q]k w nQR@ Q]k |x@U=Lt VwQ hr= CUw}B QO O}Qw; CUO x@ 9 |x]@=Q xOW xO=O KQW Tv=}Q=wm Tv=}Q=w T}QD=t R= xO=iDU= =@ Ov}=Qi |x}L=v lJwm

"CU=

Ov}=Qi |x}L=v CL=Ut^{= (} lJwm Q]knQR@ Q]k⁾⁼4 ⁽9⁾ 10 |x]@=Q R= xO=iDU= =@ =Q Ov}=Qi |x}L=v CL=Ut |=Q@ xOt; CUO x@ Q}O=kt

%O}vm OQ=Ov=DU=

⁰= min

max min (10⁾

Ov}=Qi |x}L=v CL=Ut Q=Okt u}QDW}@ w u}QDsm ?}DQDx@^maxw^minu; QO xm

"CU=|xOW OQ=Ov=DU= Q=Okt⁰w CU=yQ=t}D u=}t QO xOWx@U=Lt CL=Ut w |UO}rk= |xrY=i Q=Okt T=U=Q@ =Q O}OH XN=W s=o u}= QO "3 s=o V=WDe= x@ p=vo}U C@Uv =Q u; w s}vm|t x@U=Lt xOW OQ=Ov=DU= Ov}=Qi |x}L=v w^ud0|xOW OQ=Ov=DU= Q}O=kt xm u}= x@ xHwD =@ "s}t=v|t ^14MSN xQ}eDtOvJ

"1 p=Ft |=Q@ MU=B |=yQ}eDt Q}O=kt w V}=tR; KQ] "1 pwOH

MU=B |=yQ}eDt pQDvm pt=wa xQ=tW

Y2 ^Y1 ^{c b a} V}=tR;

0 5 0 7 0 2 0 5 0 1 3 6 3 5 3 3 3 7 3 2 1 1 1 1

1 1 1 2 1 4 1 5 1 2 0 5 0 9 0 8 0 4 0 4 1 1 1 2

1 2 1 5 1 5 1 4 1 9 0 5 0 3 0 9 0 7 0 4 1 1 1 3

0 8 0 6 1 0 0 2 0 2 2 9 3 0 2 1 2 8 2 9 1 1 1 4

2 5 3 0 3 0 2 8 2 6 1 7 1 7 1 2 1 5 2 0 1 1 1 5

3 2 3 5 4 0 3 8 3 8 1 3 1 4 1 7 1 0 1 1 1 1 1 6

4 3 4 7 4 9 4 1 4 2 0 8 0 6 0 4 0 9 0 7 1 1 1 7

2 0 3 0 2 6 2 0 2 4 1 1 1 7 1 8 1 6 1 3 1 1 1 8

"""w|Q}t=u}ULQ}t='|Q}W@|Oyt "1 p=Ft |=Q@ |Jwo=DSNRVwQ w |O=yvW}B VwQ R= pY=L G}=Dv "2 pwOH

|Jwo=DSNRVwQ |O=yvW}B VwQ pQDvm pt=wa xQ=tW

SNR (Y2^{) SNR (Y}1^{) MSN 0 ud0 c b a} V}=tR;

8 3 3 4 0 250 0 089 0 41 1 1 1 1

12 6 8 3 1 165 0 178 0 73 1 1 1 2

13 1 8 2 0 850 0 440 0 76 1 1 1 3

7 8 13 5 0 089 1 000 0 78 1 1 1 4

10 0 6 4 17 560 0 353 0 00 1 1 1 5

16 5 2 5 1 553 0 754 1 00 1 1 1 6

3 4 8 6 1 511 0 000 0 42 1 1 1 7

2 7 4 7 12 625 0 923 0 05 1 1 1 8

Q=t}D l} MU=B Q}eDt Qy |=Q@ xm OyO|t MQ |v=tR pmWt u}= "CU= MU=B Q}eDt

?}=at Ok=i |O=yvW}B VwQ xm CU= |r=L QO u}= "OwW ?=NDv= QDQ@ Q=t}D u=wvax@

"CU= xOW QmP xO=iDU= =@ u}ir-wtu;QOxmCU=^[16]wU w nv=D |xr=kt R= xDiQoQ@ xrUt u}= "2 p=Ft MU=B Q}eDt wO =@ xrUt l} |=Q@ xv}y@ Kw]U ?=NDv= x@ s=Ok= T}UB=D VwQ R=

Q}O=kt "OvOQm^17DT xkQw Ct=N[ w^16RI |Q=Umv= XN=W |=ys=vx@ p=tQv

|xU}=kt =@ =yu; "CU= 1000 w 2 =@ Q@=Q@ ?}DQDx@ MU=B |=yQ}eDt u}= |=Q@ hOy 'V=WDe= x@ p=vo}U C@Uv XN=W w OwN |O=yvW}B VwQ R= pY=L G}=Dv w pQDvm pt=wa 3 pwOH QO "OvO=O u=Wv VwQ u}= x@ C@Uv =Q OwN VwQ |}=Q=m xOW x=Q= =yV}=tR; R= |W=v x}rw= C=Oy=Wt Q}O=kt 4 pwOH QO w '=yu; Kw]U Ov}=Qi |x}L=v w |UO}rk= |xrY=i |xOW OQ=Ov=DU= Q}O=kt R}v 5 pwOH QO "CU=

C=QF= Q=Owtv C}=yv QO "CU= xOW QmP swO p=Ft |=Q@ xOW x@U=Lt^MSNx=Qtyx@

"4 pmW OwW|t sUQ pQDvm pt=wa R= |W=v u}ov=}t

|=Q@ 'CU= ?wr]t |rQDvm pt=a Qy |=Q@^MSNQDW}@ Q=Okt xm u}= x@ xHwD =@

K]U u=wvax@ OW=@ xDW=O =Q u}ov=}t Q=Okt u}QDW}@ xm |L]U |rQDvm pt=a Qy 2 p=Ft pQDvm pt=wa |=Q@ xv}y@ Kw]U '4 pmW x@ xHwD =@ "OwW|t ?=NDv= xv}y@

w nv=D |xv}y@ ?=wH "O};|t CUO x@^A1B₁C₃D₂E₂F₂G₂H₃CQwYx@

%=@ CU= Q@=Q@^[16]pQDvm pt=wa |=Q@ wU

A₁B₂C₃D₂E₂F₂G₂H₃

xOW x=Q= wU w nv=D |O=yvW}B VwQ R= |W=v u}ov=}t C=QF= Q}O=kt 6 pwOH QO

?=wH w xr=kt u}= QO |O=yvW}B VwQ ?=wH u}@ Cw=iD xm O}W=@ xDW=O xHwD "CU=

R= "CU= 2 w 1 Kw]U QO ^B |rQDvm pt=a QO 'wU w nv=D \UwD xOW x=Q=

OQwt Kw]U QO wU w nv=D VwQ QO xOt; CUO x@ u}ov=}t C=QF= Cw=iD Qo}O hQ]

hqDN= OQwt Kw]U QO u}ov=}t C=QF= Cw=iD "CU= R}J=v^B|rQDvm pt=a hqDN=

2 w 1 Kw]U QO hqDN= pwOH u}= QO "CU= xOW x=Q= 7 pwOH QO^B pt=a QO '=]N OYQO Q}R |x]@=Q R= xO=iDU= =@ "CU= xOW xO=O u=Wv 6 pwOH R=^Bpt=a

|rY= QF= Q=Okt 0 8442 CU= xOW x@U=Lt '^B K]U CUQO=v ?=NDv= |=Q@

"CU= pw= K]U QO^Bpt=a |rY= QF= Q=Okt 0 7286 w swO K]U QO^Bpt=a

'xOW |R=Ux}@W |xrUt pL =@ "CU= xOW x=Q= Q=QmD 5 =@ 2³V}=tR; KQ] l}

xOt; 2 pwOH QO^MSNw⁰'^ud0Q}O=kt pt=W |O=yvW}B VwQ R= pY=L G}=Dv

"CU=

"OyO|t u=Wv 1 p=Ft V}=tR; KQ] |=Q@ =Q¹⁵u}ov=}t C=QF= Q=Owtv 3 pmW

|rQDvm pt=a |=Q@ 1 K]U '^a|rQDvm pt=a |=Q@ 1 K]U OwW|t xOy=Wt xm u=vJ xOt; CUO x@ Q}O=kt u}vJty "OwW|t ?=NDv=^c|rQDvm pt=a |=Q@ 1 K]U w^b x@ uO}UQ |=Q@ Q=t}D u}QDy@ xm OyO|t u=Wv 1 pwOH^Y2w^Y1|=yMU=B |=Q@

u=ty |xOvQ}oQ@QO Q=t}D u}= "CU= 5 Q=t}D 'xOW |R=Ux}@W p=Ft |=Q@ hOy Q}O=kt u}vJty "CU= xO=O x=Q= |rQDvm |=yQ}eDt |=Q@ |O=yvW}B VwQ xm CU= |Lw]U CLD |xrUt |wQ |Jwo=D VwQ p=ta= R= pY=L G}=Dv |xOvQ}oQ@QO 2 pwOH

Y₂w^Y1MU=B |=yQ}eDt |=Q@ xOt; CUO x@^SNRQ}O=kt x@ xHwD =@ "CU= |UQQ@

"OwW|t ?=NDv= QDQ@ Q=t}D u=wvax@ 5 Q=t}D 'CU= 10 w 6 '4 =@ Q@=Q@ ?}DQDx@ xm OQmrta Qou=Wv xm CU= |Jwo=D VwQ*G}=Dv u=ty |O=yvW}B VwQ pY=L u}=Q@=v@

"CU= |O=yvW}B VwQ ?U=vt u}= QO |Jwo=D V=WDe= x@ p=vo}U C@Uv R= xO=iDU= xm O}W=@ xDW=O xHwD u}vJty "OwW|t MU=B |=yQ}eDt u}@ Tv=}Q=wm uOW xDiQo xO}O=v Ea=@ xrUt Qy |=Q@ xOt; CUO x@ V=WDe= x@ p=vo}U |=yC@Uv `}tHD VwQ Qo}O pmWt

"1 p=Ft |=Q@ u}ov=}t C=QF= Q=Owtv "3 pmW

"""V=WDe=x@p=vo}UC@Uvu}wvXN=W|x=Q=

"2 p=Ft |=Q@ =yu; Kw]U w pQDvm pt=wa "3 pwOH

pQDvm pt=wa 1 K]U 2 K]U 3 K]U

A: Cleaning method No Yes |

B: The chamber temperature 100^0C 200^0C 300^0C

C: Number of runs after the chamber has been cleaned 1st 2nd 3rd

D: The ow rate of SiH4 6 7 8

E: The ow rate of N2 30 35 40

F: The chamber pressure 160mtorr 190mtorr 220mtorr

G: R. F. power 30watt 35watt 40watt

H: Deposition time 11 5min 12 5min 13 5min

"2 p=Ft x}rw= C=Oy=Wt Q}O=kt "4 pwOH

^RI |Q=Umv= XN=W ^DT xkQw Ct=N[ pQDvm pt=wa xQ=tW

5 4 3 2 1 5 4 3 2 1 H G F E D C B A V}=tR;

2 056 2 085 1 985 1 919 2 118 704 688 728 839 694 1 1 1 1 1 1 1 1 1 2 275 2 165 2 234 2 240 2 205 851 874 861 867 918 2 2 2 2 2 2 1 1 2 2 565 2 456 2 714 2 643 2 677 958 1058 930 954 936 3 3 3 3 3 3 1 1 3 2 000 2 046 1 949 1 997 2 096 801 768 842 828 765 3 3 2 2 1 1 2 1 4 1 845 2 003 1 943 2 007 2 032 989 752 753 743 709 1 1 3 3 2 2 2 1 5 1 858 1 999 1 842 1 838 1 86 833 722 846 785 795 2 2 1 1 3 3 2 1 6 1 819 1 930 1 797 1 909 2 012 1150 787 1085 816 711 3 2 3 1 2 1 3 1 7 1 744 1 782 1 760 1 760 1 834 811 607 602 644 580 1 3 1 2 3 2 3 1 8 1 675 1 704 1 676 1 707 1 719 609 595 627 812 590 2 1 2 3 1 3 3 1 9 1 960 2 014 1 889 1 911 2 097 966 916 1126 1142 917 1 2 2 3 3 1 1 2 10 1 867 1 539 1 945 1 860 1 927 1392 2063 1219 1405 1389 2 3 3 1 1 2 1 2 11 1 899 1 923 1 812 1 881 1 963 893 838 993 914 865 3 1 1 2 2 3 1 2 12 1 767 1 863 1 788 1 829 1 903 1066 851 884 884 827 2 3 1 3 2 1 2 2 13 1 968 2 107 2 011 2 020 2 103 976 776 780 805 787 3 1 2 1 3 2 2 2 14 1 968 2 179 2 071 2 080 2 182 976 724 745 779 739 1 2 3 2 1 3 2 2 15 2 203 2 103 2 215 2 166 2 274 915 1023 690 721 724 2 1 3 2 3 1 3 2 16 1 900 1 916 1 909 1 905 1 942 859 869 785 806 771 3 2 1 3 1 2 3 2 17 1 980 2 101 1 985 1 961 2 077 760 692 749 781 712 1 3 2 1 2 3 3 2 18

"2 p=Ft |=Q@ xOW x@U=Lt^MSNw⁰'^ud0Q}O=kt "5 pwOH

MSN ⁰ ud⁰ V}=tR; xQ=tW MSN ⁰ ud⁰ V}=tR; xQ=tW 2 826 0 522 0 000 10 3 955 0 142 0 260 1

1 725 1 000 0 488 11 7 986 0 045 0 114 2 7 729 0 081 0 087 12 7 980 0 140 0 020 3 1 038 0 270 1 000 13 6 565 0 032 0 189 4 3 602 0 272 0 164 14 3 693 0 227 0 200 5 2 820 0 325 0 197 15 3 849 0 219 0 193 6 1 670 0 506 0 175 16 3 132 0 408 0 078 7 7 122 0 023 0 171 17 2 754 0 187 0 343 8 5 992 0 000 0 252 18 3 094 0 145 0 345 9

"""w|Q}t=u}ULQ}t='|Q}W@|Oyt

"2 p=Ft |=Q@ |rQDvm pt=wa R= |W=v u}ov=}t C=QF= Q=Owtv "4 pmW

[1^]"wU w nv=D VwQ R= pY=L u}ov=}t C=QF= Cw=iD "7 pwOH

=]N OYQO u}ov=}t C=QF= Cw=iD pt=wa

0 159 0 1156 ^B

l}ORv Q=}U@ xr=kt u}= QO |O=yvW}B VwQ OQmrta xm CiQo xH}Dv u=wD|t =Pr OwN XN=W u=v; xm u}= x@ xHwD =@ "CU= wU w nv=D \UwD xOW x=Q= VwQ x@

XN=W xm OvO=O u=Wv w xOQm xU}=kt |Jwo=D V=WDe= x@ p=vo}U C@Uv =@ =Q CiQo xH}Dv u=wD|t 'OwW|t^SNRx@ C@Uv |QDy@ G}=Dv x@ QHvt u=W|O=yvW}B QO |QDy@ G}=Dv^SNRx@ C@Uv R}v ^MSN xr=kt u}= QO |O=yvW}B XN=W xm Q_v Ot^MSNXN=W QO R}v MU=B |=yQ}eDt u}@ Tv=}Q=wm u; Q@ xwqa "OQ=OQ@

"CU= xDiQo Q=Qk

|}xrUt 'p=Ft u}= QO "CU=^[24]=O=t=y w w=}J |xr=kt R= xDiQoQ@ p=Ft u}= "3 p=Ft

[1]"wU w nv=D VwQ R= pY=L 2 p=Ft |=Q@ |rY= C=QF= Q}O=kt "6 pwOH 3 K]U 2 K]U 1 K]U pt=wa

| 0 7603 0 8269 ^A 0 8079 0 8442 0 7286 B

0 8516 0 7423 0 7869 C

0 8202 0 8339 0 7267 ^D 0 8461 0 8533 0 6813 ^E 0 6194 0 8814 0 8800 ^F 0 7335 0 8243 0 8230 G

0 8521 0 7172 0 8116 H

(0 8442 0 7286⁾

0 7286 ⁼0 1156

0 7286 ⁼0 159 ⁽12⁾

"3 p=Ft |=Q@ MU=B |=yQ}eDt Q}O=kt w V}=tR; KQ] "8 pwOH

Y2 ^Y1 pQDvm pt=wa xQ=tW

5 4 3 2 1 5 4 3 2 1 F7 ^F6 ^F5 ^F4 ^F3 ^F2 ^F1 V}=tR;

0 63 0 71 0 47 0 59 0 59 711 9 712 4 712 3 713 4 711 9 1 1 1 1 1 1 1 1 0 78 0 79 1 13 0 91 0 70 720 9 723 9 711 8 720 1 725 0 1 1 1 1 1 1 1 2 0 46 0 53 0 46 0 44 0 56 711 7 712 1 711 3 711 7 711 6 1 1 1 1 1 1 1 3 1 45 1 45 1 38 1 55 1 50 733 3 732 7 732 0 724 1 733 7 1 1 1 1 1 1 1 4 1 25 1 22 1 51 1 36 1 25 721 1 723 1 722 6 721 6 725 4 1 1 1 1 1 1 1 5 0 73 0 97 0 98 0 97 1 17 719 7 723 722 9 721 1 728 7 1 1 1 1 1 1 1 6 1 57 1 40 1 61 1 58 1 52 731 3 729 6 731 4 731 4 726 6 1 1 1 1 1 1 1 7 0 56 0 44 0 44 0 51 0 57 714 6 716 3 713 6 714 4 714 3 1 1 1 1 1 1 1 8

"""V=WDe=x@p=vo}UC@Uvu}wvXN=W|x=Q=

"3 p=Ft |=Q@ |rQDvm pt=wa R= |W=v u}ov=}t C=QF= Q=Owtv "5 pmW

⁰ '^ud0 Q}O=kt 9 pwOH QO "CU= xOW xO=O u=Wv 8 pwOH QO MU=B |=yQ}eDt 7 |=Q@ u}ov=}t C=QF= Q=Owtv "CU= xOW x=Q= 3 p=Ft |=Q@ xOW x@U=Lt^MSNw

"CU= xOW sUQ 5 pmW QO 3 p=Ft |rQDvm pt=a Kw]U |O=yvW}B VwQ 'CU= ?wr]t^MSN|xv}W}@ Q}O=kt xm u}= x@ xHwD =@

[ 1^{; +}1^{; +}1^; 1^; 1^{; +}1^{; +}1^]CQwYx@ =Q |rQDvm pt=a 7 |=Q@ xv}y@

CQwY x@ =O=t=y w w=}J VwQ R= pY=L |xv}y@ ?=wH "OyO|t xH}Dv VwQ R= pY=L ?=wH hqDN= "CU=^[ 1^{; +}1^; 1^; 1^; 1^; 1^{; +}1^] 10 pwOH xm Qw]u=ty "CU=^F6w^F3pt=wa QO =O=t=y w w=}J VwQ w |O=yvW}B hqDN= 2 w 1 Kw]U QO pt=a wO u}= |=Q@ |rY= C=QF= Q}O=kt 'OyO|t u=Wv w=}J ?=wH x@ l}ORv Q=}U@ |@=wH |O=yvW}B VwQ OyO|t u=Wv xm OvQ=O |R}J=v

"CU= xOQm x=Q=^[24]=O=t=y w

|Q}oxH}Dv "4

xOW x=Q= xNU=BOvJ p=Ut |=Q@ V=WDe= x@ p=vo}U C@Uv l} Q=DWwv u}= QO

|xrY=i |x@U=Lt XN=W u=wvax@ |UO}rk= |xrY=i |O=yvW}B VwQ QO "CU=

|oOvm=QB u=R}t |x@U=Lt |=yXN=W u=wvax@ Ov}=Qi |x}L=v w hOy R= u}ov=}t

|oO=Ux@ xNU=BOvJ |xrUt l} xOW ?@U Qt= u}= "CU= xDiQ Q=m x@ C=Oy=Wt

|a}tHD |=yVwQ Q}=U x@ |R=}v Qo}O w OQ}o Q=Qk |UQQ@ OQwt XN=W l} =@

Q}O=kt u}vJty "OW=@v |UOvy u}ov=}t =} |rY= |=yxir-wt p}rLD w x}RHD Ovv=t

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1. Euclidean distance 2. robust design

3. robust parameter design (RPD) 4. Topsis

5. cmputer-aided engineering 6. data envelopment analysis 7. principal component analysis

8. multi response performance index (MRPI) 9. desirability function

10. loss function 11. priority

12. multi criteria decision making 13. process capability

14. multivariate signal to noise ratio 15. main eect

16. refractive index (RI) 17. deposition thickness (DT)

^References

`@=vt

1. Taguchi, G., System of Experimental Design, Unipub/Kraus Int, White Plains, NY (1987).

2. Zang, C., Friswell, M.I. and Mottershead, J.E. \A re- view of robust optimal design and its application in dy- namics", Computers and Structures, 83(4-5), pp. 315- 326 (2005).

3. Wu, C.F.J. and Hamada, M., Experiments: Planning, Analysis, and Parameter Design Optimization, New York, John Wiley & Sons Inc (2000).

4. Miller, A. and Wu, C.F.J. \Parameter design for signal- response systems: A dierent look at Taguchi's dynamic parameter design", Statistical Science, 11(2), pp. 122- 136 (1996).

5. Montgomery, D.C., Design and Analysis of Experiments, 3rd edition. New York, John Wiley & Sons Inc (1991).

6. Tsui, K.L. \An overview of taguchi method and newly developed statistical methods for robust design", IIE Transactions, 24(5), pp. 44-57 (1992).

7. Ramakrishnan, B. and Rao, S.S. \A robust optimization approach using Taguchi's loss function for solving non- linear optimization problems", ASME Adv Des Autom, 32(1), pp. 241-248 (1991).

8. Ramakrishnan, B. and Rao, S.S. \Ecient strategies for the robust optimization of large-scale nonlinear design problems", ASME Adv Des Autom, 69(2), pp. 25-35 (1994).

9. Lee, K.H., Eom, I.S., Park, G.J. and Lee, W.I. \Robust design for unconstrained optimization problems using the Taguchi method", AIAA Journal, 34(5), pp. 1059- 1063 (1996).

10. Lunani, M., Nair, V.N. and Wasserman, G.S. \Graphi- cal methods for robust design with dynamic characteris- tics", Journal of Quality Technology, 29(3), pp. 327-338 (1997).

11. Lesperance, M.L. and Park, S.M. \GLMs for the analysis of robust design with dynamic characteristics", Journal of Quality Technology, 35(3), pp. 253-263 (2003).

12. Roshan, J. and Wu, C.F.J. \Performance measures in dynamic parameter design", Journal of Japanese Quality Engineering Society, 10, pp. 82-86 (2002).

13. Wu, F.C. and Yeh, C.H. \Robust design of multiple dy- namic quality characteristics", International Journal of Advanced Manufacturing Technology, 25(6), pp. 579-588 (2005).

14. Zhiyu, Z., Zhen, H. and Xiangfen, K. \New desirabil- ity function method for multi-response robust parameter design", International Technology and Innovation Con- ference (2006).

15. Dasgupta, T., Miller, A. and Wu, C.F.J. \Robust design of measurement systems", Technometrics, 52(1), pp. 80- 93 (2010).

16. Tong, L.I., Su, C.T. and Wang, C.H. \The optimiza- tion of multiresponse problems in the Taguchi method by fuzzy multiple attribute decision making", Quality and Reliability Engineering International, 13(1), pp. 25- 34 (1997).

17. Chang, H.H. \A data mining approach to dynamic mul- tiple responses in Taguchi experimental design", Expert Systems with Applications, 35(3), pp. 1095-1103 (2008).

18. Goethals, P. and Cho, B.R. \The development of a robust design methodology for time-oriented dynamic quality characteristics with a target prole", Quality and Reliability Engineering International, 27(4), pp. 403-414 (2011).

19. Pisvimol, C. \Application of genetic algorithm and Taguchi method in dynamic robust parameter de- sign for unknown problems", International Journal Ad- vanced Manufacturing Technology, 47(9-12), pp. 993- 1002 (2010).

20. Wu, F.C. \Robust design of nonlinear multiple dynamic quality characteristics", Computers & Industrial Engi- neering, 56(4), pp. 1328-1332 (2009).

21. Tong, L.I., Wang, C.H. and Tsai, C.W. \Robust design for multiple dynamic quality characteristics using data envelopment analysis", Quality and Reliability Engineer- ing International, 24(5), pp. 557-571 (2008).

"""V=WDe=x@p=vo}UC@Uvu}wvXN=W|x=Q=

22. Gauri, S.K. and Chakraborty, S. \Multi-response opti- misation of WEDM process using principal component analysis", International Journal of Advanced Manufac- turing Technology, 41(7-8), pp. 741-748 (2009).

23. Johnson, R.A. and Wichern, D.N., Applied Multivariate

Statistical Analysis, Englewood Clis, NJ, Prentice Hall (1992).

24. Chiao, C.H. and Hamada, M. \Analyzing experiments with correlated multiple responses", Journal of Quality Technology, 33(4), pp. 451-465 (2001).

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