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IEEE Journal - The Role of Polysilicon Film in the Suppression of Bird’s Beak in Poly-Buffered LOCOS, Hyundai Electronics Industries Company Limited, Semiconductor Advanced Research Division, Korea

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REFERENCES

[1] Se-Aug Jang, Chung-Soo Han, Young-Bog Kim, and In-Seok Yeo (February 1999). IEEE Journal - The Role of Polysilicon Film in the Suppression of Bird’s Beak in Poly-Buffered LOCOS, Hyundai Electronics Industries Company Limited, Semiconductor Advanced Research Division, Korea.

[2] P. U. Kenkare, C. Mazurk, J. D. Hayden, J. R. Pfiester, J. KO, H. C. Kirsch, S. A.

Ajuria, P. Crabtree, and T. Vuong (January 1994). IEEE Journal - Scaling of Poly- Encapsulated LOCOS for 0.35 pm CMOS Technology, Motorola Advanced Products Research and Development Laboratory.

[3] Scott S . Roth, Wayne J. Ray, Carlos Mazure’, Kent Cooper, Howard C. Kirsch, , Craig D. Gunderson, and Judy KO (May 1992). IEEE Journal - Characterization of Polysilicon-Encapsulated Local Oxidation

[4] Dr. Lynn Fuller (January 1999).Lecture Notes - Isolation Technology, Microelectronic Engineering Rochester Institute of Technology, USA

[5] Kevin Cox, Member, IEEE, Mark Chonko, Chris Honcik, Member, IEEE, and Shelly VanDyke (February 1996).IEEE Journal – The effect of HF Processing on Gate Oxide Degradation in Aggressive Poly Buffered LOCOS Isolation

[6] Scott S . Roth, Wayne J. Ray, Carlos Mazure’, Kent Cooper, Howard C. Kirsch, Senior Member, IEEE,Craig D. Gunderson, and Judy KO. Characterization of Polysilicon-Encapsulated Local Oxidation.

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