If you have any questions that are not answered in the manual, come and talk to us. Although the MIFF is only open during the day, laboratory users may NOT work in the facility alone. Use the 'buddy system' if you only work in the lab with one other person.
For your safety, NEVER process wafers or handle chemicals when alone in the lab. Do not work in the cleanroom if you feel tired or ill; you have taken any medicine that can make you drowsy. Only cleanroom paper, notebooks, and lab wipes should be brought and used in the cleanroom.
Use the alcohol wipes in the dressing room to wipe down items that will be taken to the cleanroom. All materials not in process should be stored in a covered box. Store your cleanroom clothing in your garment bag (labeled with your name tag clip) in the dressing area.
Safety Equipment
Function: To warn others of a fire in the event that the alarm does not sound on its own. Location: outside the dressing room door and in the service corridor by the emergency exits. Location: Loudspeakers located in the gown room, thermal chase and service corridor HAZMAT alarm activation station.
Function: To warn others of a HAZMAT situation in the event that the alarm does not sound on its own. Location: Push buttons are located in the gown room, HPM room, service corridor, at the exit doors inside the Clean Room along the main corridor, loading dock and silan cage. Function: To alert Cleanroom and support area occupants of high and low level emergencies such as chemical release or exhaust failure.
A carbon dioxide fire extinguishing system requires the user to leave the area immediately after activation. Application: It is activated in the event of a fire in a wet bench or rotary hood, if the alarm does not trigger itself. Function: Monitor specific gas and exhaust concentrations, chemical spills, oxygen concentrations, and UV/IR fire detectors in the cleanroom and support areas to ensure personnel safety.
PERSONAL PROTECTIVE EQUIPMENT
Gloves must be worn to enter the Cleanroom, but if dealing with chemicals, a second layer of gloves or heavy duty triple gloves must be worn. All gloves must be checked to ensure they are fit for use (holes, stains and deterioration make gloves unsafe to use). Reusable gloves should be washed and dried regularly if used for a long period of time.
Cryogenic Gloves: Worn when handling cryogenic liquids: filling drums, transferring from drum to drum, etc. If nitrile gloves are used, dispose of them in the waste container and put on a new pair for use in the rest of the cleanroom. NOTE: If any PPE is damaged to the point where it is no longer safe to use, discard the damaged piece.
PPE rules and restrictions: Personal safety equipment must be worn at all times when working with chemicals on wet benches. Chemical apron, face shield and chemical glove should be removed after leaving the wet bench area. No personnel wearing PPE should be outside the wet bay unless he/she is attending to an emergency situation.
Before removing the gloves, always rinse thoroughly with DI water in the sink to remove any water-soluble chemicals that may be on them. When the gloves are not in use, hang them in the wet station where they were used. This prevents chemicals from spilling out of your sleeves, onto your gloves, and onto your hands.
Hazardous Materials
The cleanroom contains some of the most hazardous chemical categories, including strong acids and bases, corrosives and combustibles. Since most of the chemicals used in the lab resemble water, customers should always assume that any liquid is hazardous. When using hotplates, check that their cup is suitable for the use of hotplates and is smaller than the surface of the plate.
When diluting an acid mixture, customers should make sure they pour the acid into the water. Customers should never mix acids and solvents - this can lead to heat, explosions or toxic fumes. They should include the names of all chemicals in the mixture, as well as their percentage ratios.
In addition, customers must clearly mark the name of the chemicals, the customer's name, where someone would contact the customer, and when the customer expects to return on a clean mop. If users wish to store the mixture for longer than one processing session, they should place it in a bottle with a screw cap and store it, properly labeled, in the appropriate chemical cabinet or refrigerator. Chemicals may only be moved in and out of the MIFF with permission and on approved carriers.
Since the bottom of the bottle may be dirty, place it on a clean napkin to avoid contaminating the wet benchtop. Never lift a bottle by the handle alone as you are likely to catch the bottom of the bottle on the bench and break it. Do not hang the goggles on any part of the tubing as extreme cold will damage the elastic.
The intense cold will cause rapid contraction of the floor followed by rapid expansion as it returns to ambient temperatures. In the laboratory clean air room, the resulting particle/micro contamination problem will require replacement of the floor.
Waste Disposal
If you have more than a gallon of organic waste, notify a member of staff and they will help you clean it up. Write "Acid" on the liner bag or attach cleanroom tape labeled "Acid" to the top of the bag so it is visible. Write "Organic" on the liner bag or attach cleanroom tape labeled "Organic" to the top of the bag so it is visible.
Write "Photoresist" on the liner bag or attach cleanroom tape labeled "Photoresist" to the top of the bag so it is visible. Place the bag in the "Photoresist Waste" container near the chemical cabinets at the entrance research lab. After rinsing, cap the bottles, label them as rinsed, put them in a plastic bag and place them in the “Rinsed/Dried” container at the chemical cabinets at the entrance to the research lab.
After rinsing, cap the bottles, mark them as dry, place them in a plastic bag, and place them in the "Rinsed/Dried" container near the chemical cabinets near the entrance research lab. Place broken glass (including wafers, glassware, etc.) in the "Broken Glass" container near the chemical cabinets near the entrance research lab. Rinse off arsenic-contaminated waste as much as possible before placing it in the container.
When you're done with a blade, put it in the 'used blade' slot of the pack it came from. If the user wants to dispose of the razor blade or other "sharp items", put them in the appropriate sharps container located in the clean room.
Emergency Procedures
Brush off as much of the solid as possible first, then apply as a small amount to the skin. Consult the chemical's safety data sheet if you are unsure of the correct course of action. Call 9111 on the phone in the locker room and ask for an ambulance to take the victim to the medical clinic.
Check the MSDS for the hazards of the chemical and be sure to keep the MSDS with the victim. Take the MSDS to give to the doctor and give a report of the proceedings to the laboratory manager after the incident. If chemicals are spilled on the laboratory resident, follow Section – If there is a chemical spill on a person.
However, if the customer is unsure of the severity of the spill, they should not hesitate to call the EHS department. A major spill is defined as a spill that spreads rapidly, is toxic, endangers people or property, endangers the environment outside the building, is more than 1/2 gallon of liquid, and/or is any amount of hydrofluoric acid (HF). If cleaning requires the use of a respirator, please contact a Cleanroom staff member.
The system provides state-of-the-art control and thus ensures the highest level of protection for the laboratory, the environment and personnel. All changes of cylinders for gas supply are carried out by the Gas Supplier and, as part of the supply contract, it also provides an emergency response for the investigation and recovery of all. A copy of the ERP for handling toxic gas leaks is in Appendix 3. MIFF users and personnel act as the first line of response and are responsible for ensuring effective evacuation of the area and containment of the incident site until the emergency response team arrives.
The carbon dioxide alarm will be triggered if there is too much heat or if a fire starts in one of the fume hoods. Although the alarm may only sound at one of the fume cupboards, it is important that customers evacuate the cleanroom as quickly as possible. A major power outage can be described as a loss of electrical power to an area of the institute's campus due to failure of high voltage equipment or transmission lines.
Such failures can lead to the loss of lighting, air conditioning and building management systems, requiring the evacuation of part or all of the property.
PROJECT DESCRIPTION FORM
MASDAR FABRICATION FACILITY ACCESS REQUEST
Undercroft Evacuation Routes
Toxic Gas Emergency Response Plan
