Tgp chi khoa hgc trUdng Dgi hgc Quy NhOn Tdp IV, sd 2 ndm 2010
KY THUAT PHUN PHfj NHI^T PHAN St DyNG LANG DQNG MANG
M 6 N GTRAN THANH THAP. PHAM PHI HtJNG^ VO THI THANH TUY^N' 1. G l 6 l THifeU CHUNG
Hidn nay, vide dng dung cdng nghd mdng mdng trong cdng nghidp da vd dang thu hut stf quan tdm ngbidn cdu eiia ede nhd khoa hpc trdn the gidi. Cdc pbtfdng phdp dtfdc dilng d l lang dpng mdng mdng ed thi dtfdc chia thdnh bai nhdm cbinb sau: Nhdm cdc pbtfPng phdp vdt ly: Bay hdi kich thich bang laser, epitaxy chiim phdn td (Molecular Beam Epitaxy-MBE) vd phun xa dm ctfc (Sputtering); Nhdm cdc phtfdng phdp hda bpe:
Cdc phtfPng phdp lang dpng pha hdi (lang dpng pha bdi hda bpe (Chemical Vapour Deposition-CVD), epitaxy ldp nguydn tijf (Atomic Layer Epitaxy-ALE)) vd cdc phtfdng phdp sd dung precursor dung dieb (phun phu nhidt phan (Chemical Spray Pyrolysis CSP), quay phu (Spin-coating), nhung phu (Dip-coating), sol-gel).
Trong sd' cdc phtfpng phdp ndu trdn, phtfdng phdp phun phu nhidt phdn rd't dtfdc quan tdm ngbidn cdu d l lang dpng cdc mdng ddc, mdng xd'p, cdc mdng gd'm vd cdc loai mdng bpt [1-10]. Cae tfu diim eua pbtfdng phdp phun phii nhidt phdn [1-8]:
Ddy Id phuong phdp cho phep di ddng pha tgp mgi nguyin to vdi ti li mong mudn bdng cdeh pha thim chd't cdn pha tgp (oxit hay mudi cda cdc chd't do) vdo dung dich phun.
Khdng gidng nhU cdc phuong phdp cdng nghi ldng dgng mdng mdng khde, phun phd nhiet phdn khdng ddi hdi cdc dieu kien cdng nghi qud khdt khe. Ddy chinh la Uu
diim tuyet vdi khi phuong phdp phun phd nhiet phdn dugc dng dung trong sdn xud't hdng loat d quy md cdng nghiep.
Tde do ldng dgng vd chiiu ddy cda mdng cd thi di ddng diiu khiin bang cdeh thay ddi cdc thdng sd cda qud trinh ldng dgng.
- Qud trinh ldng dgng dUOc thuc hiin d khodng nhiet do trung binh tvt 100 din 600°C. Ky thudt phun phd nhiit phdn cho phip ldng dgng cdc mdng mong md khdng yiu cdu qud nghiim ngdt vi nguyin vdt lieu ban ddu. Hon thi nUa, phuong phdp ndy khdng bi han chivi vdt lieu ldm di, dinh hudng cdu true cda dihay dgc trUng be mat cda di.
- Bang cdeh thay ddi thdnh phdn cda dung dich phun trong qud trinh ldng dgng, ky thudt ndy cd thi dugc svt dung di chi tgo mdng cd cdu true da ldp vd cdc mdng cd thdnh phdn thay ddi theo chiiu ddy.
50 TRAN THANH THAI, PHAM PHI H C N G , V O THI THANH TUY^N
- Phuong phdp ndy cd thi ldng dgng dU(fc mdng cd dg ddng diu cao tren mgt di$n tich rdng.
Ndm 1966 lln diu tidn Chamberbn vd Skarman suf dung ky thudt ndy de chd tao mdng Cadmium Sulphide (CdS) cho pin mdt trdi, sau dd cd ra't nhieu ngbidn cdu vl ky tiiudt phun phd nbi^t phdn d l l^ng dpng mdng mdng da dtfdc cdng bd [1-20]. M. S.
Tomar, F. J. Garcia da thdo ludn quy trinh chd tao vd cdc tinh chd^t ciia mdng vat beu v6 ed cung nhtf dng dung ciia cbiang trong vi^c chd tao phIn tuf quang didn, ldp pbii chdng phdn xa vd edm bidn khi [2]. J. B. Mooney vd S. B. Radding nghien cdu phtfdng phdp phun nhidt phdn, tinh chd't cda mdng vd cd l^ng dpng bdn quan vdi dilu kidn cdng nghd [3].
Trong cdc nghidn cdu tidp theo, ddc bi^t Id tai Tallinn Technical University, M, Krunks vd cdc cdng sif da khdng ngOfng hodn thif n vd phdt triin vdi cdc nghidn cdu vl ling dpng mdng chacopyrite dng dung cho cdc pbIn td quang didn bing ky thudt phun phii nhidt phdn [17,18].
2. CAU TAO CUA Hfe PHUN PHU NHlfeT PHAN 2.1. Md ta h$ phun phu nhi^t phSn
Cae khdi ehde ndng chu ydu cua mdt be phun phu nhiet phan bao gdm: binh phun, dung dich cbd'a precursor, b l sidu dm d l tdn nhd dung dich vd tao sol khi, 16 nung, bo o o dieu khiin nhidt dp vd be cung ed'p kbi ndn.
Hinh 1 bilu dien mot sd ed'u hinh nguydn 15^ cua he phun phii nhiet phan.
(a) U SL'tL\
KMagMilafai-. K M *
Hinh I. Cdc cdu hinh nguyin ly cda he phun phd nhiet phdn [2,8,14,16]
KY THUAT PHUN PHU NHIET PHAN SlT DUNG LANG DONG M A N G M 6 N G 51 Cd thd thd'y, chung bao gom mdt sd dang sau: Cdu binh sd dung dd ddt thang ddng (Hinh la), ca'u hinh thid't lap dd nam ngang (Hinh lb), ca'u binh suf dung dd ddt nam ngang (bay nam ngbidng) nbtfng diu phun dilu chinh g6c ngbidng 45° (bay nam ngang) (Hinh le, d).
2.2. Nguydn tac chung
Phtfdng phdp phun pbii nhidt phdn la pbtfdng phdp sd dung d6ng kbi ndn (trd v l mat hda bpe) d l mang dung dieb cd preeusor (vdi ti Id eac hdp pbIn cdc cha't ban diu phii hdp) dtfdi dang sol kbi dd'n be mat dd dtfdc gia nhidt d mpt nhidt dp xdc dinh. 6 nhidt dp xdc dinh cua dd, ede chd't tham gia phdn dng trong dung dieb se phan dng vdi nhau, lang dpng trdn be mat dd va hinh thdnh mang mdng ed thanh phan mong mudn.
Cdc gipt sol khi khi va cham vdo b l mat dd, lan rpng ra thdnh ca'u trde binh dia tron vd se trai qua qud trinh nhidt phdn. Hinh dang vd kich thtfde eua dia ti-dn phu thudc vdo dpng Itfdng vd tbi tich cda gipt sol kbi, cung nhtf nhidt dp dd [1-10].
3. ANH HLfCfNG CUA IVIOT SO THONG SO CONG NGHE CHfNH DEN HINH THAI HOC BE MAT MANG MONG CuInS^ L X N G DONG
BANG PHUN PHU NHIET PHAN 3.1. Anh hufdng cua nhidt dp de
Nhidt dp dd Id mpt trong cae thdng sd quan trpng nhd't trong ky thudt phun pbii nhidt phdn. Hinh 2 minh hpa sif khae nhau binh tiidi hpc eua be mat mang mdng CuInSj dtfdc lang dpng tai ede nhidt dp dd' khde nhau.
HBra^tWg^TO^lMiWwiwMWl'Wiii^W
t
Hinh 2. Anh SEM cua hinh thdi hgc bi mat mdng mdng CuInS^ dugc ldng dgng tgi cdc nhiet do dikhdc nhau; (a) T^ = 260PC; (b) T^ = 280"C;(c) T^ = 360°C;
(d) T^ = 430"C vdi ti le moi Cu/In = 1.1 vd S/Cu = 5
52 TRAN THANH THAI, PHAM PHI HUNG. VO THI THANH TUYEN
Tai nhidt dp dd dtfdi 300°C cdc gipt sol l^ng dpng vln cdn gidu dung mdi. Do dd, mpt ldp mdng d'm hidn didn d trdn cdng cda mdng trong sudt qud trinh lang dpng. Stf khd qud nhanh eiia ldp ndy do tde dung ciia tJug sud't da tao thanh vdt ndt hoac bam dinh khdng tdt ti-dn mdng hinh thdnh (Hinh 2a, b). 6 nhiet 66 di qud cao (>420°C) cdc gipt ldng dpng hiu nhtf kho. Do 66, cdc hat dtfdc binh thdnh vd cd thi kdt tu thdnh ddm vi sif lan rpng chdm chap. Kd't qud ndy ldm tdng dp go ghi bl mdt cua mdng (Hinh 2.2d). Trong kbi dd, khodng nhidt 66 320 - 400"C (hinh 2.2c) mdng bam dinh tdt, dong deu, khdng ndt gay vd kd't qud thu dtfdc mdng ddc sit nhtf chdng tdi da thdng bdo trong [19]. Ngbidn cdu ve stf thay ddi binh thdi hpc bl mdt mdng CuInS^ l^ng dpng vdo nhiet dp dd' bIng pbtfdng phdp phun phu nhidt phdn cung dtfdc cdng bd bdi nhieu nhdm nghidn cdu khde nhau [4,13,17,18]. Cdc kd't qud diu cho thay, vdi stf tdng cua nhidt dp de, chiiu ddy ciia mdng gidm, kich thtfde bat kd't tinh gia tdng, binh tiidi hpc bl mdt cung thay ddi tfif phang dd'n go ghe bdn vd dp truyin qua giam vi dnh sdng tdn xa.
3.2. Anh hifdng ciia ti 1$ moi Cu/In trong dung d|ch ban d4u
Tuf kd't qua tbi bidn trdn Hinh 3 cho thd'y, ed'u true vi md ciia mang mdng CuInS phu thupe manh vao thanh pbIn dung dieb precursor ban diu. Suf dung chd'dp dung dich ban diu In-rich vd S-rich cho phep lang dpng mdng mdng CuInSjVdi kich tiitfdc hat kdt tinh cd kich tiitfdc 30-60 nm ddn ddn bl mat phang (Hinh 3a.b).
Hinh 3. Anh FE- SEM cda mdng mdng CuInS^ lang dgng vdi ti li moi Cu/In khde nhau trong dung dich ban ddu; (a) In-rich (Cu/In = 0.85);(b) S-rich
(Cu/In = 1, S/Cu = 6); (c) Cu-rich (Cu/In = 1.25)
Khi mdng lang dpng sijf dung dung dich ban diu chd dd Cu-rich (Cu/In>l. 1), trdn bl mat mdng cd thi phdn biet hai vilng rd ret: mpt vdng pblng vd mpt vung kdt tii vdi kich thtfde bat ldn. Cdc mdng trd nen g6 ghi hdn vdi kich tiitfdc bat 140-180 nm trong vung pbing va ldn ddn vdi micrometer trong cdc vilng kd't tu. Kdt qud nay pbii hdp vdi eac ngbidn cdu tiifdc day [13,17,18].
4. QUA TRINH
H I N HTHANH MANG MONG TRONG KY THUAT PHUN PHU NHIET
P H A NQua trinh phun pbii nhidt phan bao gdm nhieu giai doan khde nhau, chdng cd thi
Kt THUAT PHUN PHU NHIET PHAN S\J DUNG LANG DONG M A N G M 6 N G 53
xay ra bdn tid'p bode dong thdi trong qud trinh lang dpng [5]:
1) Qua trinh hinh thdnh sol kbi tfif precursor dung dich.
2) Qua trinh van chuyin sol kbi.
3) Qua trinh nhidt phdn precursor trdn dd.
4.1. Qua trinh hinh thanh sol khi tuf precursor dung djch
Trong qud trinh phun pbii nhidt phdn stf ding diu cda kich thtfde bat sol kbi la mpt trong nhitng tidu chu^n bdng diu d l lang dpng mdng. Stf dong deu cdc hat sol kbi cd thi dieu khiin dd ddng bang cdeh sd dung cdc loai diu phun ed binh dang khde nhau, dp Itfc kbi nen, tin sd' sidu dm bode trtfdng tinh didn.
Trong [9], C. M. Lampkin da dtfa ra md binh cd chd' dpng bpe eiia diu phun suf dung trong phun phd nhidt phdn (Hinh 4). Theo md binh nay, vCing A (ngay trtfdc voi phun), tai ddy dung dich dang bat diu eud'n ra khdi diu phun vd gia td'c thanh viing dong khi xody chuyin dpng khdng diu theo binh ndn. Chiiu ddi eua viing A ttfdng dng vdi td'c dp vd Itfu Itfdng dung dich. Trong viing B cdc gipt da binh thdnh bdi ede life nen chu yd'u eiia ddng khdng kbi chuyin dpng bdn loan. Dong sol kbi tai diim nd'i ciia viing A vd B the hidn dong xody md rpng binh xoan d'e. Vung C (viing bdn ngodi binh ndn sol khi), ndi ma cae gipt sol kbi ed van td'c thd'p dtfdc binh thanh.
Dons dung dich
Ddng khi nen
Hinh 4. Co chi ddng lUc hgc cda ddu phun sdt dung khi nen [9]
Nhtf vdy, ed t b i thd'y rang, ed'u tao vd kich thtfde binh bpe eua diu phun anh htfdng rd't ldn dd'n vide binh thanh sol kbi vd dung dieb kbi phun phai tao dtfdc mpt khdng gian cd dang stfdng vd cae gipt stfdng ndy phdi ed kich thtfde dii nhd. D l dat dtfdc dilu nay kich thtfde diu phun phai du nhd. Thong thtfdng dtfdng kinh diu phun ed kich thtfde (|) = 0.5-1.0mm. Trdn Hinh 5 gidi thieu mpt sd diu phun tbtfdng siif dung trong ky thudt phun phu nhiet phan.
54 TRAN THANH THAI, PHAM PHI HUNG, VO THI THANH TUY6N
I
(a) (b)
Hinh 5. Mgt sd ddu phun dugc sdt dung trong phuong phdp phun phu [5];
(a) Kiiu don tia; (b) Kiiu da tia 4.2. Qua trinh vSn chuyin sol khi
Trong sol khi ede gipt sol di chuyin theo ddng kbi mang vd sau 66 bay hdi. Trong trtfdng hdp doi hdi mang ddc, dieu quan trpng trong qud trinh van chuyin Id cdc gipt sol cd thi van chuyin dd'n be mat dd' md khdng tao thdnh cdc bat bpt trtfdc khi ddn de.
Theo W. M. Sears vd ede eong sif [10], dp life cua dong khi mang se quyet dinh ca quy dao eiia gipt sol kbi, sif bay bdi va ca'u true eua mdng binh thdnh. Cdc kha ndng xay ra trong qud trinh binh thdnh mang dtfdc md ta trdn Hinh 6 dtfdi ddy.
PHUN PHU
Va cham be pi^t;
va ling dong dudi
d?ngb^ ;
PHAN
T H O A T R A
c Cac gipt sol / " khithoat ra , • ' Bpt hinh thanh
trong khong kiu
Hinh 6. Cdc khd ndng bii'n ddi cda sol khi khi di'n bi mat dindng [10]
Trong qud trinh nay, giai doan dung mdi bay bdi Id quan ti-png nhd't. Dung mdi chi bay bdi ddng k l tai vi tri cdeh 5mm trtfdc kbi btfdng dd'n be mat de vi nhiet dp moi trtfdng khdng khi trong khoang khong gian phia mat tii/dc dd con khd cao [5] (Hinh 7),
KY T H U A T PHUN PHU NHlfeT PHAN SlJ DUNG LANG DONG M A N G M 6 N G 55
350
^_^
u
^""^ o J3 Jid
00
<o c
JS ^
50' t o
<o-
• « M
g
300 - 250
200 1
150
•
100 ^ 50 -
10 20 30 40 50 60
Khoang each tu dS (mm)
70 . 80
Hinh 7. Gradient nhiet do mdi trudng khdng khi ddi vdi cdc nhiet do di;
2WC,250''Cvd3WC[5]
Cdc gipt ldn nhat (ldn bdn 10[im) ddng vai trd quan trpng hdn ede gipt nhd bdi vi chung chda dtfng hiu hd't precursor cdc dung dich ban diu. Vi vdy, nhidt dp lang dpng phai la nhidt dp td'i tfu ddi vdi cdc gipt ldn. Ngodi ra, cac gipt ldn bay bdi chdm hdn nhieu so vdi cdc gipt nhd va ede gipt cd kich thtfde dtfdng kinh ban diu ldn bdn 20nim thay ddi khdng ddng k l cho dd'n kbi cham vdo b l mat dd'. Cdc gipt vdi kich thtfde dtfdng kinh nhd hdn 3nim lai tde dpng khde nhau. Dung mdi eua chung se bay bdi hoan todn trtfdc khi ddn tdi b l mat 6i. Khi nong dp be mat vtfdt qud gidi ban hda tan ede precursor lang dpng trdn b l mat eua gipt. Stf lang dpng xdy ra vi dung mdi bay hdi nhanh vd stf khud'eb tdn chd't tan ehdm. Dilu ndy ddn dd'n binh thdnh vo xdp vd ede hat rdng. Ddy chmb Id ydu td khdng mong mudn trong mdng binh thdnh bdi vi chdng lam tdng dd go ghe ciia mdng [5].
4.3. Qua trinh nhi$t phan precursor trdn dd
Kbi gipt sol khi dap vao b l mat ciia dd nhilu qud trinh ed thi xdy ra dong thdi: stf bay bdi eua dung mdi con lai, stf trai rpng cda gipt sol vd stf nhidt phdn cda preeusor.
H I U bd't cae tde gia cho rang kbi sd dung ky thudt phun phu nhidt phdn chi cdc qud trinh kiiu lang dpng pha bdi hda hpc (CVD) mdi ed t h i lang dpng mdng chd't Itfdng cao [1-7].
Trong [3,7], cdc tde gia da dtfa ra md binh cdc qua trinh vat ly xay ra vdi stf gia tang nhidt dp dd (Hinh 8).
56 TRAN THANH T H A I , PHAM PHI HUNG. VO THI THANH TUY^N
Di
. : • . . Hditthir&n
O C> -5^^^
o o o
• Suang
B D
Hinh 8. Qud trinh ldng dgng theo sU gia tdng nhiet do di [3, 7]
Trong chd dd nhidt dp dd tha'p nhd't (qud trinh A), gipt sol bin ttf nhidn ti-dn bl mdt dd vd nhidt phdn. Tai nhidt dd dd cao bdn (qud trinh B), dung mdi bay hdi hodn todn trong sudt qud trinh van chuyin cua gipt vd gipt stfdng khd dap vdo be mdt 6e vd xdy ra qud trinh nhidt phdn. 6 nhidt dp dd eao bdn nC^a (qud trinh C), dung mdi cdng bay hdi trtfdc kbi gipt sol cham dd'. Khi dd gipt stfdng ran ndng chdy va bay hdi ma khdng nhidt phdn vd khud'eb tdn bdi dd'n dd d l ti-ai qua qud tiinh CVD. 6 nhidt dp dd' cao nha't (qud trinh D), precursor bay hdi trtfdc khi btfdng dd'n dd va cdc hat the ran dtfdc hinh thdnh sau phdn dng hda bpe tfif pha bdi.
Trong [5], D. Perednis va cdng stf cdng dtfa ra md binh md ta qua trinh trdn nhtf sau: khi cdc gipt sol khi va cham vdo bl mat 6i tbi cdc kha ndng sau ddy (xem Hinh'9) cd tbi xay.
o^o
^S^J^m^^
Bdm dinh
^mk^mMm
Ndv ra Trdi ra Trdi ra vd co Bdn tde rut Igi
Hinh 9. Su va chgm cda gigt sol khi tren bi mgt dindng [5]
Gipt sol kbi va cham be mat cd tbi bdm dinh, nd'y ra, trdi ra, trai ra va co rut lai
bode ldm bdn tde ttf nhidn ti-dn bl mat. Stf ti-ai ra cua cdc gipt va cham cd till ddn den
binh thdnh mdng ddc bode ti-dn b l mdt mang cd cdc vdt ti-dn. Stf ndi tid'p bin nhau ciia
cdc gipt sol khi sau khi va cham bl mat dd ndng phu thudc vdo kich thtfde, dp nhdt va
td'c dp eua gipt sol khi binh tiidnh kd tid'p. Nd'u chung qud nhdt bode khd, chung se bdm
dinh vd nd'u chung qud nhanh, chung se ban tde. Nd'u cdc gipt tirdi ra vdi tde dp qua cao,
cdc vong tron dtfdc binh thdnh. ISfbtf vdy, chi cdc bat trai ra vdi tde dd khdng qua cao se
din dd'n hinh thdnh mdng dac.
KY THUAT PHUN PHU NHIET PHAN SlT PyNG LANG DONG MANG MONG 57 Cbi sau kbi gipt sol kbi va cham vao b l mat dd ndng, ede tinh chd't vdt 1;^ vd hda
bpe eiia precursor dung dich mdi ddng vai trd quan trpng. Trong giai doan ndy, stf trdi ra cda gipt va cham, stf bay bdi eiia dung mdi con dtf vd stf nhidt phdn cdc mudi xdy ra dong thdi. Stf trdi ra nhanh cda cdc gipt din dd'n binh thanh mdng phing vd dd phai cung ed'p dii nhidt dp cho dung mdi bay bdi vd nhidt phdn cdc mudi. Trong trtfdng hdp ngtfdc lai, ede vd't ndt se phdt triin vi stf co nit cda mang dung dieb khd nhanh trdn b l mat d phia trdn. Stf co nit ti-dn b l mdt dan dd'n gipt trdi ra trdn b l mdt vd binh thdnh dng sud't trong dung dich, kbi dng sud't vtfdt qud sdc cdng cue bp ed till gidn ra vd ldm mdng ndt gay [5,15].
5. KET LUAN
Phun phd nhidt phdn la mpt ky thudt linh boat vd hidu qud d l lang dpng mdng mong ehalcopyrite (CuInS^...) vd cdc loai mdng oxide kim loai (ZnO, ITO...). Cha't Itfdng vd ede tinh chd't eiia mdng phu thupe manh vdo cdc thdng so' cdng nghd. Thdng so' quan trpng nha't la nhidt dp dd', chung dnh htfdng rd rdt dd'n binh thdi hpc be mat eiia mdng mdng lang dpng. Ti Id moi cua ede thdnh phIn trong precursor dung dich ban diu Id thdng so' cdng nghd quan trpng thd hai, chung ciing anh htfdng manh dd'n ca'u tnic vi md cua mdng binh thdnh. Ngodi ra, ydu clu quyd't dinh trong qud trinh phun phu nhidt phdn Id trdnh stf bay bdi dung mdi hodn toan trong gipt sol khi trong lue van chuyin bdi vi dieu ndy se ddn dd'n hinh thdnh be mat mang lang dpng bode g l gbl bode ndt gay, bdm dinh khdng td't bode xd'p.
TAI LIEU THAM KHAO [I] p. S. PatU, Mat. Chem. Phys.. Vol. 59(1999), pp. 185-198.
[2] M. S. Tomar, F. J. Garcia, Prog. Crystal Growth Charact, Vol. 4 (1981), pp. 221-248.
[3] J. B. Mooney, S. B. Radding, Ann. Rev. Mater. Set. Vol. 12 (1982), pp. 81-101.
[4] B. R. Pamplm, Prog. Crystal Growth Charact., Vol. 1 (1979), pp. 395-403.
[5] D. Perednis, L. J. Gauekler, J. Electroceramics, Vol. 14 (2005). pp. 103-111.
[6] R. Krishnakumar. V Subramanian, Y. Ramprakash. A. S. Lakshmanan. Mat. Chem.
Phys., Vol. 15 (1987). pp. 385-395.
[7] S. Oktik. Prog. Cryst. Growth Charact., Vol. 17 (1988). pp. 171-240.
[8] M. Okuya. K. Nakade. D. Osa. T. Nakano, G. R. A. Kumara. S. Kaneko, J. Photochem.
Photobio. A: Chemistry, Vol. 164 (2004). pp. 167-172.
[9] C. M. Lampkin. Prog. Crys. Grow. Charact., Vol. 1 (1979), pp. 405-416.
[10] W. M. Sears. M. A. Gee, Thin Solid Films, Vol. 165 (1988). pp. 265-277.
[II] M. Miki-Yoshida, E. Andrade, Thin Solid Films, Vol. 224. (1993), pp. 87-96.
[12] J. Hirunlabh, S. Suthateeranet, K. Kirtikara, R. D. Pynn, Thammasat Int. J. Sc.Tech.,No\.
3 (1998), pp. 9-20.
58 TRAN THANH THAI. PHAM PHI HUNG, VO THI THANH TUYEN [13] A. Goossens. J. Hofhuis, Nanotechnology. Vol. 19 (2008). 424018.
[14] E. Moniea-Loredana, E. lulia-Florentina, Fascicle of Management and Technological Engineering, Annals of the Oradea University. Vol. 7 (2008), pp. 1385-1388.
[15] B. Godbole, N. Badera, S. B. Shrivastav. V. Ganesan. Jl. Instrum. Soc. India, Vol. 39 (2009). pp. 42-45,.
[16] H. A. Hamedani. Master Thesis. Georgia Institute of Technology, (2008).
[17] A. Mere. O. Kijatkina. H. Rebane. J. Krustok. M. Krunks. J. Physic. Chem. Sol.. Vol 64 (2003), pp. 2025-2029.
[18] M. Krunks, O. Bijakina, T. Varemaa, V. Miklib, E. Mellikova, Thin Solid Films, Vol.
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SUMMARY
THIN FILMS GROWN BY SPRAY PYROLYSIS TECHNIQUE
Tran Thanh Thai. Pham Phi Hung. Vo Thi Thanh Tuyen Spray pyrolysis technique has been applied to grow a wide variety of thin films.
These films were used in various semiconductor devices such as solar cells, sensors, anti- reflection coatings and other devices. It is observed that often the properties of deposited CuInSj thin films depend on the preparation conditions. The substrate surface temperature is the most critical parameter as it influences film morphology and crystallinity. Besides, processes involved in the spray pyrolysis technique are also discussed in this review as well.
" Khoa Ky thuat & Cong nghe, Tnfdng Dai Hoc Quy Nhcfn
" Vi6n Vat 1^ ky thuSt. Tnfdng Dai Hoc Bdch Khoa Ha Npi ' Khoa H6a hoc, Tnfdng Dai hoc Quy Nhdn
Ngay nhan b^i: 11/04/2010; Ng^y nhan dang: 16/06/2010.