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Design Consideration Of Microheater Structure For Micro Devices Applications.

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Academic year: 2017

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ABSTRACT

For past few years, microheater has been widely investigated because of their

extensive applications in gas sensors, flow rate sensors and other micro system.

Basically, the optimum performance of microheater can be determine by low power

consumption, low thermal mass and better temperature uniformity. The design

consideration ofmicroheater structure using polymer based material for micro device

application is performed in this thesis. The purpose of this project is to define which

polymer based material and other suitable material will be used to form the heater

device through sputtering and micro device fabrication process. For the design

consideration, COMSOL Multiphysics 4.4 is used to perform and implement the

simulation analysis in purpose to get the optimum performance of microheater and to

determine the best polymer based material to be chosen as main material for

fabrication process. As a result, for microheater substrate, polyimide material

produced the highest output temperature, while gold material give the highest

temperature for heating element. Meanwhile, in term of uniformity output temperature,

polysilicon is always the best. The collected data are recorded and perform in graph

analysis.

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