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Mechanical characterization of mems piezoresistive microcantilever sensor for biosensing application (design and simulation).

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Academic year: 2017

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Figure 2.1 Example of MEMS devices, (a) Microcantilever, (b) Micromotor, (c) Micro gears
Figure 2.2 MEMS microcantilever sensor, (a) without binding mass, (b) with binding mass
Figure 2.3 Schematic of MEMS microcantilever deflection
Table 2.1 Advantages and disadvantages of the different detection schemes
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Mechanical characterization of mems piezoresistive microcantilever sensor for biosensing application (design and simulation).

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