FNI 1C 1
e
-γ
A
+e
-γ
A
+Sample
Spectroscopy
-γ
e
-γ
Photons In
Infrared Visible Ultraviolet X-RaysPhotons Out
FNI 1C 5
A
+A
+Sample
Ions In
Ions Out
SIMS, Secondary Ion Mass SpectrometryToF SIMS, Time of Flight SIMS,
ICP MS, Inductively Coupled Plasma Mass Spectrometry
X-Ray Tools
X-Ray Spectroscopy
Energy Dispersive X-ray Spectroscopy (EDS)
Wavelength Dispersive X-ray Spectroscopy
(WDS)
X-ray fluorescence (XRF)
X-ray photoelectron spectroscopy (XPS)
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Energy Dispersive X-Ray
Spectroscopy, EDS
Element maps
Spectra
Applications
System overview
System image
EDS Applications
Used to determine the elemental composition of a
sample.
Can perform both qualitative (What is it?) and
quantitative (How much?) analysis.
Depending on the window low atomic number
elements may not be visible.
Super ultra thin windows detect down to berilium.
Older detectors may only detect fluorine and
higher.
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FNI 1C 13
FNI 1C 15
Vendors
EDAX
http://www.edax.com/index.html
Princeton Gamma Tech
http://www.pgt.com/
Noran/Kevex/Thermo
http://www.thermo.com/BURedirect/welcomeMsg/1,5107,28,00.html
Oxford Instruments
FNI 1C 17
Wavelength Dispersive X-Ray
Spectroscopy, WDS
System Overview
Detector
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FNI 1C 21
Wavelength Dispersive X-Ray
Spectroscopy
System Overview
Detector
Other X-Ray Analysis
X-Ray Photoelectron Spectroscopy (XPS)
X-Ray Tomography Nano CT
FNI 1C 23
X-Ray Photoelectron Spectroscopy
An incoming X-Ray removes a core electron
which will have a characteristic energy
based on the difference between the initial
X-Ray energy, which is of known energy,
and the energy to remove the inner electron
from the atom, which is characteristic.
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Quantum Numbers
Number Name Permitted Values Defines
n Principal (1, 2, 3, …) Electron shell (1=K, 2=L, 3=M …)
l Azimuthal 0 to n-1 Electron cloud shape
m Magnetic -l to +l Electron shell orientation in a magnetic field
s Spin ±½ Electron spin
direction j Inner precession l±½
But j≠-½
Electron Shells
K
L
IL
IIL
IIIM
IM
IIM
IIIM
IVM
Vn
1
2
2
2
3
3
3
3
3
l
0
0
1
1
0
1
1
2
2
s
+
½
+
½
-
½
+
½
+
½
-
½
+
½
-
½
+
½
FNI 1C 27
Electron Transitions
1.
The change in n must be ≥ 1 (Δn ≠ 0)
2.
The change in l can only be ±1
Other Surface Analysis Methods
Focused ion beam (FIB)
Mass spectrometry/Residual gas analyzer (Mass spec/RGA)
Secondary ion mass spectrometry (SIMS)
Time of Flight SIMS (ToF SIMS)
Atom probe microscopy
FNI 1C 29
Mass Spectrometry, Mass Spec
Residual Gas Analyzer, RGA
Sorts atoms, molecules and molecule
fragments based on mass.
Secondary Ion Mass Spectrometry
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ToF SIMS
ToF SIMS
FNI 1C 33
Atom Probe Microscopes
http://www.ornl.gov/info/ornlreview/rev28-4/text/atoms.htm
Imago Scientific Instruments
FNI 1C 35
Auger Electron Spectroscopy AES
http://www.eaglabs.com/cai/augtheo/process.htm
AES has a number of advantages over X-Ray
analysis.
It can be confined confined to a very small spot.
Signals are generated only from a very shallow depth into
the sample (3 nm).
It can be combined with an ion mill to create a very detailed
analysis of bulk materials.
Intermediate in price between SEM/EDS and more
FNI 1C 37
Rutherford Backscattering
Spectroscopy, RBS
http://www.eaglabs.com/cai/rbstheo/intro.htm
Uses alpha particles (He
++) to analyze a
Fourier Transform Infrared
Spectroscopy FTIR
Infrared light of different energies
is passed through the sample.
How the sample absorbs light is
analyzed.
Uses Infra-Red EM radiation to analyze
molecules, especially organic compounds.
•http://www.forumsci.co.il/HPLC/FTIR_page.html
FNI 1C 39
Raman Spectroscopy
A change in polarizability of the
molecule results in a shift in
frequency of a laser.
Focused Ion Beam FIB
This method uses a beam of ions and magnetic
lenses to focus the ions onto the sample.
FIB is used to drill tiny holes in a sample.
This is usually used to see the cross sectional
structure of the device.
http://dsa.dimes.tudelft.nl/usage/technology/FIB/
http://mfgshop.sandia.gov/1400_ext_IonBeam.htm
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FIB Links
Links
http://hyperphysics.phy-astr.gsu.edu/hbase/quantum/hydazi.html#c3 http://elchem.kaist.ac.kr/vt/chem-ed/analytic/ac-meths.htm
FNI 1C 45
Other Surface Analysis Methods
Focused ion beam (FIB)
Mass spectrometry/Residual gas analyzer (Mass spec/RGA)
Secondary ion mass spectrometry (SIMS)
Time of Flight SIMS (ToF SIMS)
Atom probe microscopy
