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Structural and Corrosion Properties of Hydrogenated Amorphous Carbon Films with Silicon-Based Interlayer

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Nguyễn Gia Hào

Academic year: 2023

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Table 2.1 The characteristic of the diamond, graphite, and different DLC types [73].
Figure 2.6 Residual stress of the DLC films with and without metals interlayer [76].
Figure  2.7  Schematic  illustration  of  the  mechanism  of  low  residual  stress  in  a  multilayer DLC film [52]
Figure  2.9  Ion  energy  distribution  in  (a)  conventional  PECVD  and  (b)  magnetic  confinement PECVD [4]
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