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C R C

R E V I V A L S

Polymers for Electronic

Applications

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Boca Raton London New York

CRC Press is an imprint of the

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First published 1989 by CRC Press Taylor & Francis Group

6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742

Reissued 2018 by CRC Press © 1989 by CRC Press, Inc.

CRC Press is an imprint of Taylor & Francis Group, an Informa business

No claim to original U.S. Government works

This book contains information obtained from authentic and highly regarded sources. Reasonable efforts have been made to publish reliable data and information, but the author and publisher cannot assume responsibility for the validity of all materials or the consequences of their use. The authors and publishers have attempted to trace the copyright holders of all material reproduced in this publication and apologize to copyright holders if permission to publish in this form has not been obtained. If any copyright material has not been acknowledged please write and let us know so we may rectify in any future reprint.

Except as permitted under U.S. Copyright Law, no part of this book may be reprinted, reproduced, transmitted, or utilized in any form by any electronic, mechanical, or other means, now known or hereafter invented, including photocopying, microfilming, and recording, or in any information storage or retrieval system, without written permission from the publishers.

For permission to photocopy or use material electronically from this work, please access www.copyright.com (http://www.copyright. com/) or contact the Copyright Clearance Center, Inc. (CCC), 222 Rosewood Drive, Danvers, MA 01923, 978-750-8400. CCC is a not-for-profit organization that provides licenses and registration for a variety of users. For organizations that have been granted a photocopy license by the CCC, a separate system of payment has been arranged.

Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation without intent to infringe.

Library of Congress Cataloging-in-Publication Data

Polymers for electronic applications, editor, Juey H. Lai p. cm.

Includes bibliographies and index. ISBN 0-8493-4704-1

1. Electronics—Materials. 2. Polymers. I. Lai, J. H. (Juey H.)

TK7871.15.P6P6261989 621‘ .381—dc20 89-9860 A Library of Congress record exists under LC control number: 89009860 Publisher’s Note

The publisher has gone to great lengths to ensure the quality of this reprint but points out that some imperfections in the original copies may be apparent.

Disclaimer

The publisher has made every effort to trace copyright holders and welcomes correspondence from those they have been unable to contact.

ISBN 13: 978-1-315-89680-9 (hbk) ISBN 13: 978-1-351-07590-9 (ebk)

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Gambar

FIGURE 2. Proximity and contact printing.
FIGURE 5. Raster scan vs. vector scan in electron-beam lithographic system.
FIGURE 6. An X-ray lithographic system.
FIGURE 8. Resist film thickness vs. exposure dose (negative resist).
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