• Tidak ada hasil yang ditemukan

2. ALTERNATIVELY DRIVEN DUAL NANOWIRE ARRAYS BY ZnO AND CuO FOR

3.3. CONCLUSIONS

In conclusion, we describe a strategy for creating an air-bridge-structured percolating nanowire array platform that capable of promptly detecting and reliably discriminating between three gases (H2, CO, and NO2). Air-bridge-structured, which has the contact point between nanowire, alternatively driven multiple nanowires, which were made by metal deposition (by e-beam evaporator) and post annealing process in nanoscale on single substrate, was used to form two-dimensional microarray. The current transport characteristics are determined by the conduction paths through the overlapping nanowires.

In n-n junction, the current, known as the thermionic emission current, has to pass the overlapping nanowires over the barrier height due to the depletion zone, while in p-p junction, the hole will pass through the hole accumulation layer in air. In p-n junction, the electrons also flow over the barrier height, however, the resistance of the sensor also depends on the chemical reaction of the analytes on the surface of CuO, which decrease the sensitivities of the gases. These provide the ability of a given sensor array to differentiate among the junctions. The sensors were tested for their ability to distinguish three gases (H2, CO, and NO2), which they were able to do unequivocally when the data was classified using LDA.

Although several strategies for creating an e-nose have been suggested earlier, such as gradients in temperature, nanowire thickness and density, and variation of materials, forming the nanowire junctions array can be used to differentiate the sensor properties of the nanowire-based arrays. Other than the synthesis of the nanowires, all other steps in the fabrication of the e-nose were carried out using top-down microfabrication process, useful for making low cost, nanowire-based e-nose chips, useful for the for a variety of commercial industries, including the food, environmental, bio-medical, and various scientific research fields. As future work, since the e-nose here was carried out by means of artificial gases, a robust sensing study will be carried out with real gas samples for real-world gas comparison test74.

43

REFERENCES

1. Hu, J., Odom, T. W. & Lieber, C. M. Chemistry and physics in one dimension: synthesis and properties of nanowires and nanotubes. Accounts of Chemical Research 32, 435-445 (1999).

2. Huang, J., Virji, S., Weiller, B. H. & Kaner, R. B. Polyaniline nanofibers: facile synthesis and chemical sensors. Journal of the American Chemical Society 125, 314-315 (2003).

3. Han, W., Fan, S., Li, Q. & Hu, Y. Synthesis of gallium nitride nanorods through a carbon nanotube-confined reaction. Science 277, 1287-1289 (1997).

4. Pan, Z. W. & Wang, Z. L. Nanobelts of semiconducting oxides. Science 291, 1947-1949 (2001).

5. Gong, D. et al. Titanium oxide nanotube arrays prepared by anodic oxidation. Journal of Materials Research 16, 3331-3334 (2001).

6. Cho, K.-S., Talapin, D. V., Gaschler, W. & Murray, C. B. Designing PbSe nanowires and nanorings through oriented attachment of nanoparticles. Journal of the American Chemical Society 127, 7140-7147 (2005).

7. Huang, M. H. et al. Room-temperature ultraviolet nanowire nanolasers. science 292, 1897-1899 (2001).

8. Huynh, W. U., Dittmer, J. J. & Alivisatos, A. P. Hybrid nanorod-polymer solar cells. Science 295, 2425-2427 (2002).

9. Comini, E., Faglia, G., Sberveglieri, G., Pan, Z. & Wang, Z. L. Stable and highly sensitive gas sensors based on semiconducting oxide nanobelts. Applied Physics Letters 81, 1869-1871 (2002).

10. Baughman, R. H., Zakhidov, A. A. & de Heer, W. A. Carbon nanotubes--the route toward applications. Science 297, 787-792 (2002).

11. Wu, Y. & Yang, P. Direct observation of vapor-liquid-solid nanowire growth. Journal of the American Chemical Society 123, 3165-3166 (2001).

12. Liu, C. et al. Vapor-solid growth and characterization of aluminum nitride nanocones. Journal of the American Chemical Society 127, 1318-1322 (2005).

44

13. Burda, C., Chen, X., Narayanan, R. & El-Sayed, M. A. Chemistry and properties of nanocrystals of different shapes. Chemical reviews 105, 1025-1102 (2005).

14. Zhong, Z., Yin, Y.-d., Gates, B. & Xia, Y. Preparation of mesoscale hollow spheres of TiO2 and SnO2 by templating against crystalline arrays of polystyrene beads. Advanced Materials 12, 206-209 (2000).

15. Kolmakov, A. & Moskovits, M. Chemical sensing and catalysis by one-dimensional metal- oxide nanostructures. Annu. Rev. Mater. Res. 34, 151-180 (2004).

16. Park, W. I., Yi, G. C., Kim, M. & Pennycook, S. J. Quantum confinement observed in ZnO/ZnMgO nanorod heterostructures. Advanced Materials 15, 526-529 (2003).

17. Sysoev, V. V., Button, B. K., Wepsiec, K., Dmitriev, S. & Kolmakov, A. Toward the nanoscopic

“electronic nose”: hydrogen vs carbon monoxide discrimination with an array of individual metal oxide nano-and mesowire sensors. Nano letters 6, 1584-1588 (2006).

18. Barsan, N. & Weimar, U. Conduction model of metal oxide gas sensors. Journal of Electroceramics 7, 143-167 (2001).

19. Chen, P.-C., Shen, G. & Zhou, C. Chemical sensors and electronic noses based on 1-D metal oxide nanostructures. Nanotechnology, IEEE Transactions on 7, 668-682 (2008).

20. Semancik, S. & Cox, D. Fundamental characterization of clean and gas-dosed tin oxide. Sensors and Actuators 12, 101-106 (1987).

21. Batzill, M. & Diebold, U. The surface and materials science of tin oxide. Progress in surface science 79, 47-154 (2005).

22. Chen, X. & Moskovits, M. Observing catalysis through the agency of the participating electrons:

Surface-chemistry-induced current changes in a tin oxide nanowire decorated with silver. Nano letters 7, 807-812 (2007).

23. Choi, Y.-J. et al. Novel fabrication of an SnO2 nanowire gas sensor with high sensitivity.

Nanotechnology 19, 095508 (2008).

24. Kolmakov, A., Zhang, Y., Cheng, G. & Moskovits, M. Detection of CO and O2 using tin oxide nanowire sensors. Advanced Materials 15, 997-1000 (2003).

25. Li, C. et al. Surface-depletion controlled gas sensing of ZnO nanorods grown at room 45

temperature. Applied Physics Letters 91, 032101-032101-032103 (2007).

26. Craven, M., Gardner, J. & Bartlett, P. Electronic noses—development and future prospects.

TrAC Trends in Analytical Chemistry 15, 486-493 (1996).

27. Collier, W., Baird, D., Park-Ng, Z., More, N. & Hart, A. Discrimination among milks and cultured dairy products using screen-printed electrochemical arrays and an electronic nose.

Sensors and Actuators B: Chemical 92, 232-239 (2003).

28. Baik, J. M. et al. Tin-oxide-nanowire-based electronic nose using heterogeneous catalysis as a functionalization strategy. ACS nano 4, 3117-3122 (2010).

29. McAlpine, M. C., Ahmad, H., Wang, D. & Heath, J. R. Highly ordered nanowire arrays on plastic substrates for ultrasensitive flexible chemical sensors. Nature Materials 6, 379-384 (2007).

30. Sysoev, V. V., Goschnick, J., Schneider, T., Strelcov, E. & Kolmakov, A. A gradient microarray electronic nose based on percolating SnO2 nanowire sensing elements. Nano letters 7, 3182- 3188 (2007).

31. Liao, L. et al. Multifunctional CuO nanowire devices: p-type field effect transistors and CO gas sensors. Nanotechnology 20, 085203 (2009).

32. Chen, P.-C., Ishikawa, F. N., Chang, H.-K., Ryu, K. & Zhou, C. A nanoelectronic nose: a hybrid nanowire/carbon nanotube sensor array with integrated micromachined hotplates for sensitive gas discrimination. Nanotechnology 20, 125503 (2009).

33. Hwang, I.-S. et al. Large-scale fabrication of highly sensitive SnO< sub> 2</sub> nanowire network gas sensors by single step vapor phase growth. Sensors and Actuators B: Chemical 165, 97-103 (2012).

34. Yin, A., Li, J., Jian, W., Bennett, A. & Xu, J. Fabrication of highly ordered metallic nanowire arrays by electrodeposition. Applied Physics Letters 79, 1039-1041 (2001).

35. Zhao, Y.-P., Ye, D.-X., Wang, G.-C. & Lu, T.-M. Novel nano-column and nano-flower arrays by glancing angle deposition. Nano Letters 2, 351-354 (2002).

36. Plawsky, J. L., Kim, J. K. & Schubert, E. F. Engineered nanoporous and nanostructured films.

Materials Today 12, 36-45 (2009).

46

37. Poxson, D. J., Schubert, M. F., Mont, F. W., Schubert, E. & Kim, J. K. Broadband omnidirectional antireflection coatings optimized by genetic algorithm. Optics letters 34, 728- 730 (2009).

38. Chen, J., Wang, K., Hartman, L. & Zhou, W. H2S detection by vertically aligned CuO nanowire array sensors. The Journal of Physical Chemistry C 112, 16017-16021 (2008).

39. Yu, T. et al. Controlled Growth and Field‐Emission Properties of Cobalt Oxide Nanowalls.

Advanced Materials 17, 1595-1599 (2005).

40. Reddy, M. et al. α‐Fe2O3 Nanoflakes as an Anode Material for Li‐Ion Batteries. Advanced Functional Materials 17, 2792-2799 (2007).

41. Wan, Q. et al. Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors.

Applied Physics Letters 84, 3654-3656 (2004).

42. Yu, C. et al. Integration of metal oxide nanobelts with microsystems for nerve agent detection.

Applied Physics Letters 86, 063101-063101-063103 (2005).

43. Meier, D. C., Semancik, S., Button, B., Strelcov, E. & Kolmakov, A. Coupling nanowire chemiresistors with MEMS microhotplate gas sensing platforms. Applied Physics Letters 91, 063118-063118-063113 (2007).

44. Hwang, S. et al. A near single crystalline TiO2 nanohelix array: enhanced gas sensing performance and its application as a monolithically integrated electronic nose. Analyst 138, 443-450 (2013).

45. Star, A., Joshi, V., Skarupo, S., Thomas, D. & Gabriel, J.-C. P. Gas sensor array based on metal- decorated carbon nanotubes. The Journal of Physical Chemistry B 110, 21014-21020 (2006).

46. Aygun, S. M. Gas sensors based on ceramic pn heterocontacts. (Ames Lab., Ames, IA (US), 2004).

47. Steinhauer, S. et al. Gas Sensing Properties of Novel CuO Nanowire Devices. Sensors and Actuators B: Chemical (2012).

48. Sysoev, V. et al. Percolating SnO< sub> 2</sub> nanowire network as a stable gas sensor:

Direct comparison of long-term performance< i> versus</i> SnO< sub> 2</sub> nanoparticle films. Sensors and Actuators B: Chemical 139, 699-703 (2009).

47

49. Li, D., Hu, J., Wu, R. & Lu, J. G. Conductometric chemical sensor based on individual CuO nanowires. Nanotechnology 21, 485502 (2010).

50. Huang, J. & Wan, Q. Gas sensors based on semiconducting metal oxide one-dimensional nanostructures. Sensors 9, 9903-9924 (2009).

51. Hoa, N. D. et al. Synthesis of porous CuO nanowires and its application to hydrogen detection.

Sensors and Actuators B: Chemical 146, 266-272 (2010).

52. Bedi, R. K. & Singh, I. Room-temperature ammonia sensor based on cationic surfactant- assisted nanocrystalline CuO. ACS Applied Materials & Interfaces 2, 1361-1368 (2010).

53. Wang, C., Fu, X., Xue, X., Wang, Y. & Wang, T. Surface accumulation conduction controlled sensing characteristic of p-type CuO nanorods induced by oxygen adsorption. Nanotechnology 18, 145506 (2007).

54. Hoa, N. D., An, S. Y., Dung, N. Q., Van Quy, N. & Kim, D. Synthesis of p-type semiconducting cupric oxide thin films and their application to hydrogen detection. Sensors and Actuators B:

Chemical 146, 239-244 (2010).

55. Fan, Z. et al. Toward the development of printable nanowire electronics and sensors. Advanced Materials 21, 3730-3743 (2009).

56. Talin, A. A., Hunter, L. L., Léonard, F. & Rokad, B. Large area, dense silicon nanowire array chemical sensors. Applied physics letters 89, 153102-153102-153103 (2006).

57. Lupan, O. et al. Selective hydrogen gas nanosensor using individual ZnO nanowire with fast response at room temperature. Sensors and Actuators B: Chemical 144, 56-66 (2010).

58. Xing, Y. et al. Optical properties of the ZnO nanotubes synthesized via vapor phase growth.

Applied Physics Letters 83, 1689-1691 (2003).

59. Zhu, Y. et al. Large-scale synthesis and field emission properties of vertically oriented CuO nanowire films. Nanotechnology 16, 88 (2005).

60. Xu, C., Woo, C. H. & Shi, S. Formation of CuO nanowires on Cu foil. Chemical Physics Letters 399, 62-66 (2004).

61. Shim, W. et al. On-film formation of Bi nanowires with extraordinary electron mobility. Nano letters 9, 18-22 (2008).

48

62. Sun, Y. et al. In situ observation of ZnO nanowire growth on zinc film in environmental scanning electron microscope. The Journal of chemical physics 132, 124705 (2010).

63. Strelcov, E., Davydov, A. V., Lanke, U., Watts, C. & Kolmakov, A. In Situ Monitoring of the Growth, Intermediate Phase Transformations and Templating of Single Crystal VO2 Nanowires and Nanoplatelets. ACS nano 5, 3373-3384 (2011).

64. Kim, M. H. et al. Growth of metal oxide nanowires from supercooled liquid nanodroplets. Nano letters 9, 4138-4146 (2009).

65. Dang, H., Wang, J. & Fan, S. The synthesis of metal oxide nanowires by directly heating metal samples in appropriate oxygen atmospheres. Nanotechnology 14, 738 (2003).

66. Yu, T., Zhao, X., Shen, Z., Wu, Y. & Su, W. Investigation of individual CuO nanorods by polarized micro-Raman scattering. Journal of crystal growth 268, 590-595 (2004).

67. Zhang, Y. et al. Decoration of ZnO nanowires with Pt nanoparticles and their improved gas sensing and photocatalytic performance. Nanotechnology 21, 285501 (2010).

68. Ahn, M.-W. et al. Gas sensing properties of defect-controlled ZnO-nanowire gas sensor.

Applied Physics Letters 93, 263103-263103-263103 (2008).

69. Lupan, O., Chai, G. & Chow, L. Novel hydrogen gas sensor based on single ZnO nanorod.

Microelectronic Engineering 85, 2220-2225 (2008).

70. Chang, S.-J., Hsueh, T.-J., Chen, I.-C. & Huang, B.-R. Highly sensitive ZnO nanowire CO sensors with the adsorption of Au nanoparticles. Nanotechnology 19, 175502 (2008).

71. Paska, Y., Stelzner, T., Christiansen, S. & Haick, H. Enhanced sensing of nonpolar volatile organic compounds by silicon nanowire field effect transistors. ACS nano 5, 5620-5626 (2011).

72. Mubeen, S. & Moskovits, M. Gate‐Tunable Surface Processes on a Single‐Nanowire Field‐ Effect Transistor. Advanced Materials 23, 2306-2312 (2011).

73. Yoon, D. H., Yu, J. H. & Choi, G. M. CO gas sensing properties of ZnO–CuO composite.

Sensors and Actuators B: Chemical 46, 15-23 (1998).

74. Tisch, U. & Haick, H. Nanomaterials for cross-reactive sensor arrays. MRS bulletin 35, 797 (2010).

49

75. Park, W. J. et al. Alternatively driven dual nanowire arrays by ZnO and CuO for selective sensing of gaes. Sensors and Actuators B: Chemical 185, 10-16 (2013).

76. Park, W. J. et al. Self-Assembled and Highly Selective Sensors Based on Air-Bridge-Structured Nanowire Junction Arrays. ACS Applied Materials & Interfaces 5, 6802-6807 (2013).

50

Dokumen terkait