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Extensive Tracking Performance Analysis of Classical feedback control for XY Stage ballscrew drive system.

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Academic year: 2017

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Figure 1: Ball screw drive XY milling table. Fig. 2. FRF measurements of x- and y-axes
Fig. 3. Open Loop Bode Diagram of PID controlled system
Fig. 4. Max. Peak Sensitivity Function ( = 6dB)

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