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The distance between the spot and the center of the image represents the amount of drift. The first line represents a discrete sampling of the function wx0(g), and the second line represents a discrete sampling of w1x(g).

Figure 1. Scanning electron microscope with the corresponding imaging model.
Figure 1. Scanning electron microscope with the corresponding imaging model.

Multi-scale static calibration

  • Static distortion calibration
  • Projection model
  • The static calibration method
  • Static calibration of the JEOL JSM 820

Modern works [18, 29] use either a low-magnification perspective model or a high-magnification orthographic projection with a projection key at the transition magnification that is determined experimentally (typically 5 k×). Scalar dg=−~r3TC+gis the depth of the world origin relative to the center of the imaging system in the direction of the principal ray~r3.

Figure 8. An example of static distortion at 400 × of magnification. The image size is of 512 × 512 pixels, and the size of the squares is of 25 µm per side
Figure 8. An example of static distortion at 400 × of magnification. The image size is of 512 × 512 pixels, and the size of the squares is of 25 µm per side

A small toy application: Cantilever deformation measurement

It then approaches the top of the console which is progressively pushed forward by the MM3A-EM. Euclidean layering is done using the cantilever length given by the manufacturer.

Figure 11. The setup of the example: 1. Holder of the cantilever; 2. Kleindiek MM3A-EM ; 3
Figure 11. The setup of the example: 1. Holder of the cantilever; 2. Kleindiek MM3A-EM ; 3

Conclusion

The evolution over time and zoom of pixel movements and spatial distortion and projection matrices are modeled by means of PDA.

Author details

Scanning Electron Microscopy for Quantitative Measurements of Small and Large Strains Part I: Sem Imaging at 200 to 10,000 Magnification. Toward rapid time- and magnification-dependent calibration of global displacement in scanning electron microscopes.

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Scanning Electron Microscopy with a Retarded Primary Beam

Introduction

Since the very beginning of the electron microscopy era, the possibility of having an electron energy very low at the sample and sufficiently high in the column has been known from devices using immersion objective lenses [1,2]. Surprisingly, the first successful implementation of the idea of ​​slowing down the electron beam just on the sample was not conditioned by preliminary simulation studies or the assembly of a dedicated device;.

Motivation

The interaction volume of the beam in solid targets is too large, therefore embedded structures such as deposits are imaged vaguely and both thin surface films and many relief details are invisible. The positive charge is only moderate, thanks to the partial retraction of the slowest emitted electrons by the field of the surface potential. Additionally, electrons exiting the sample near the surface barrier are partially reflected, so the height and shape of the barrier contribute to the image signal.

For this reason, the spatial density of the generation of the image information increases steeply, so that below 1 keV we can get e.g. tissue sections without agents with heavy metal salts, not only very high contrast, but also all structural details visualized, including those not normally highlighted with postfixation or staining media [16]. The reasons for reducing the energy of electron incidence on targets in the scanning devices down to the lowest values, including the implementation principle described below, have existed in the historical literature since the beginning of the electron microscopy era and have been permanently demonstrated and supported recently with indisputable results from the early 1990s. Nevertheless, the purpose of this chapter is to summarize the basics of the method, although it also includes a list of successful applications where very low-energy SEM provides an important added value.

Implementation

The key interest is to know the electron-optical parameters of the combination of the objective lens of the SEM with the electrostatic field above the sample. Energy dependences of the spot size for a typical magnetic focusing lens combined with a cathode lens. The advantages of an assembly containing a cathode lens include the landing energy of electrons that can be easily adjusted by the sample bias with the alignment of the microscope column unaffected.

The alignment of the cathode lens consists of placing the anode drill on the optical axis and adjusting the sample by means of slight tilts to a parallel position with respect to the anode. Electrons emitted from individual locations on the sample are collimated into narrow beams in the strong field so that those emitted around the center of the field of view mostly escape through the anode bore. As Figure 3 shows, the mismatch in the angular distribution that normally occurs with the sample in a magnetic field is almost completely eliminated by means of the electric field for ke = 11.

Figure 1. Energy dependences of the spot size for a typical magnetic focusing lens combined with a cathode lens.
Figure 1. Energy dependences of the spot size for a typical magnetic focusing lens combined with a cathode lens.

Applications

  • Surfaces
  • Immersed objects
  • Local crystallinity
  • Internal stress
  • Semiconductors
  • Thin sections

It has been repeatedly stated that reducing the energy of the incident electrons leads to reduced radiation damage to the sample. Another view could be based on the general fading of the channeling contrast at these energies. As seen in the EBSD map, the two Al grains in Figure 9, grains A and B, are close to the (111) orientation.

Now let us return to the final inversion of the p/n contrast on the p-type/n-type substrate pattern near zero landing energy. In Figure 15, we see the phenomenon depending on the relative position of the group of samples and the detector, as well as on the beam current and dose. Unfortunately, only some details of the structure are emphasized in this way, mainly through coloring.

Figure 5.  Mesoporous carbon nitride foam as a carrier for catalytic gold nanoparticles, CL mode, primary energy 10 keV.
Figure 5. Mesoporous carbon nitride foam as a carrier for catalytic gold nanoparticles, CL mode, primary energy 10 keV.

Conclusions

Acknowledgements

In: Proceedings of the 2nd Workshop of the European Microbeam Analysis Society, Electron Microbeam Analysis, Mikrochimica Acta Supplement 12; May 1991; Du-. In: Proceedings of an International Conference on Solid-to-Solid Phase Transformations in Inorganic Materials 2005, Vol. Energy-selective scanning electron microscopy to reduce the effect of contamination layers in electron microscopy.

The contrast mechanism of injected charge in scanned imaging of doped semiconductors by very slow electrons.

Microstructure Evolution in

Ultrafine-grained Magnesium Alloy

AZ31 Processed by Severe Plastic Deformation

Experiment

  • Equal-channel angular pressing
  • High-pressure torsion
  • Experimental techniques of microstructure investigation .1 Light microscopy
  • Material processing
  • Experimental techniques of microstructure investigation

At the same time, one of the anvils rotates and the torsional stress is imposed on the specimen. Several authors [14, 15] used the FEM technique to determine the stress distribution and other parameters, e.g. the influence of the coefficient of friction, torque, etc. The effective strain distribution through the thickness of the samples N=0, N =1/2, and N=1 in the upper and middle plane showing the comparison of the FEM simulation.

After homogenization, discs with a diameter of 19 mm and a thickness of 1-2 mm were cut from the seed bed. The penetration depth depends on the angle between the direction of the ion beam and the surface of the sample. A schematic of the Precision Ion Polishing System (PIPS) used for ion polishing is shown in Figure 4 [17].

Figure 1. The scheme of pressing of the rectangular sample with the square cross-section through the ECAP die a) with Ψ = 0 and b) Ψ ≠ 0 [8].
Figure 1. The scheme of pressing of the rectangular sample with the square cross-section through the ECAP die a) with Ψ = 0 and b) Ψ ≠ 0 [8].

Results and discussion

  • Microstructure evolution of AZ31 processed by ECAP
    • EBSD

The microstructure of the initial extruded bar (0P) consists of large grains of 50–100 m mixed with relatively fine grains of 2–5 m. The microstructure of the initial extruded bar (0P) consists of large grains of 50–100 ≈m mixed with relatively fine grains of 2–5 μm. The microstructural features of the sample after 2 ECAP passes (not shown here) are very similar to those after 1 ECAP pass, ie. the bimodal grain size distribution and the change in orientation in the large grains remain almost unchanged.

The microstructure and texture of the sample after 12 ECAP passages (12P) are shown in Figure 9. The variation in the fraction of low-angle boundaries (misorientation angle < 15°, LAGB) and high-angle boundaries (misorientation angle > 15°, HAGB) as a function of the ECAP passport. Variation of the fraction of HAGB and LAGB as functions of the ECAP passport number.

Figure   5:   The   microstructure   of   the   extruded   and   ECAPed   AZ31   alloy
Figure   5:   The   microstructure   of   the   extruded   and   ECAPed   AZ31   alloy

3.2 Thermal stability of the UFG structure investigated by EBSD

Thermal stability of the UFG structure investigated by EBSD

The microstructure of the samples annealed at 450 °C and 500 °C was observed with a light microscope and is shown in Figure 18. Grain size distribution and mean grain size of the samples studied by EBSD were calculated from data measured in the 100 × 100 area μm for all annealing temperatures to obtain better statistics. Note that the magnification of Figures 17d and 17e is two times smaller than the magnification of the previous inverse polar figure maps; simultaneously four times larger sample area µm) is shown in Figure 17d and 17e.

Microstructure of the AZ31 sample after extrusion and 4 passes of ECAP, (a) inverse pole figure map and (b) grain size distribution. Microstructure of the AZ31 EX-ECAP sample after 1 h isochronous annealing at (a) 450 °C and (b) 500 °C (light microscope images). Dependence of the average grain size (number of averages, excluding twins) of the EX-ECAP AZ31 alloy on the annealing temperature after 1 h isochronous annealing process.

Table 2. The average grain sizes at different annealing temperatures.
Table 2. The average grain sizes at different annealing temperatures.

Microstructure evolution in UFG AZ31 processed by HPT investigated by ACOM-TEM The microstructure of the materials after SPD cannot be often observed by light microscopy

The microstructure of the peripheral part (see figure 22b) is homogeneous with very small grains (only nm). EBSD IPF image of microstructure of the AZ31 sample after 1 turn of HPT, (a) central part and (b) middle part. The sample was examined after 5 turns of HPT using ACOM-TEM in the center and peripheral part of the disc.

The sample, after 5 revolutions of HPT, was examined by ACOM-TEM in the center and the peripheral part of the disc. ACOM-TEM image of the microstructure of the AZ31 sample after 5 turns of HPT, (a) middle part and (b) periphery. TEM image of the microstructure of the AZ31 sample after 1 round of HPT, (a) middle part and (b) periphery.

Figure 21: EBSD IPF image of microstructure of the AZ31 sample after 1 turn of HPT, (a) central part  and (b) middle part. 
Figure 21: EBSD IPF image of microstructure of the AZ31 sample after 1 turn of HPT, (a) central part  and (b) middle part. 

4 Conclusions

Conclusions

Due to limited resolution, light microscopy can be used to investigate the initial stages of grain fragmentation, i.e. the samples processed by a low number of ECAP passes or low number of HPT turns and especially in zones around the disc centers;. EBSD has been a very powerful technique for investigating various stages of grain refinement. TEM allows to characterize the details of the microstructure, namely the dislocation arrangements, grain boundary character (equilibrium vs. nonequilibrium grain boundaries‐ . ries), twinning, twinning and other special boundaries, etc.;.

The special technique of ACOM-TEM can be used to characterize the final stages of grain processing (saturation) with grain sizes approaching the nanometer range (grain size .. lt; 100 nm), which is typical for peripheral areas of specimens processed by many turns of HPT;. The complex characterization of the microstructure with various electron microscopy techniques allows to understand the microscopic mechanisms of grain refinement, grain fragmentation, structure stability, as well as other important properties of ultrafine-grained materials processed by severe plastic deformation . Microstructure evolution in ultrafine-grained magnesium alloy AZ31 processed by severe plastic deformation http://dx.doi.org.

Gambar

Figure 6. The pixel drift across time and magnification (left, image x-axis; right, image y-axis).
Figure 7. The Kalman filter prediction absolute error across time and magnification (left, image x-axis; right, image y-axis)
Figure 10. The RMS reprojection error through magnification scales. The average RMS error is about 0.9 pixel.
Figure 11. The setup of the example: 1. Holder of the cantilever; 2. Kleindiek MM3A-EM ; 3
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