Brian L. Harrison
Brian L. Harrison
Corporate Vice President
Corporate Vice President
General Manager
General Manager
Fab/Sort Manufacturing
Fab/Sort Manufacturing
September 16, 2003
September 16, 2003
I DF M a nufa c t uring
I DF M a nufa c t uring
U pda t e
I nt e l’s M a nufa c t uring
I nt e l’s M a nufa c t uring
Le a de rship
Le a de rship
y
y
Scale:
Scale:
–
–
Leading edge capacity, investment, & people
Leading edge capacity, investment, & people
y
y
Agility:
Agility:
–
–
Customer Responsiveness
Customer Responsiveness
y
y
Operational Excellence:
Operational Excellence:
–
–
Disciplined execution & continuous improvement
Disciplined execution & continuous improvement
Scale Scale
Agility Agility
Scale Scale
I nt e l’s M a nufa c t uring
I nt e l’s M a nufa c t uring
Le a de rship
Le a de rship
y
y
Scale:
Scale:
–
Scale Scale
I nt e l’s 3 0 0 m m Fa b Sit e s
I nt e l’s 3 0 0 m m Fa b Sit e s
Ireland Ireland
Fab 24
Fab 24
Oregon Oregon
D1C/
D1C/D1DD1D
New Mexico New Mexico
Fab 11X
Fab 11X
–
Arizona Fab 12 announced as next
300mm fab for 65nm
90nm
90nm
65nm
65nm
Dev
Scale Scale
I nt e l’s 3 0 0 m m fa bs
I nt e l’s 3 0 0 m m fa bs
•
• D1C (OR) D1C (OR)
•
• 130nm production running (yields > 200mm)130nm production running (yields > 200mm)
•
• 90nm process validated and shipping pre90nm process validated and shipping pre--production samplesproduction samples
•
• Fab 11X (NM)Fab 11X (NM)
•
• 130nm production running (yields > 200mm)130nm production running (yields > 200mm)
•
• 90nm tools & process in checkout (on track); production in Q490nm tools & process in checkout (on track); production in Q4
•
• Fab 24 (IR)Fab 24 (IR)
•
• 90nm facility ready; installing tools (on track); production in 90nm facility ready; installing tools (on track); production in 2004
2004 •
• D1D (OR)D1D (OR)
•
• 65nm facility and tools online; development underway (for 65nm facility and tools online; development underway (for
production in 2005) production in 2005)
•
• Fab 24 (IR) & Fab 12C (Arizona) are next in line for 65nm Fab 24 (IR) & Fab 12C (Arizona) are next in line for 65nm
I nt e l’s M a nufa c t uring
I nt e l’s M a nufa c t uring
Le a de rship
Agility Agility
Le a de rship
y
y
Scale:
Scale:
–
–
Leading edge capacity, investment capability & people
Leading edge capacity, investment capability & people
y
y
Agility:
Agility:
–
Done Done
Agility
Agility
N e w T e c hnology Ra m p Le a de rship
N e w T e c hnology Ra m p Le a de rship
1 3 0 nm M a nufa c t uring Ca pa c it y
1 3 0 nm M a nufa c t uring Ca pa c it y
F20 F20 Done Done D2 D2 Done Done F22 F22 Done Done F17 F17 Done Done
1 3 0 nm 1 3 0 nm Proc e ss Proc e ss
Other. 3 Other. 3 Done Done D1C D1C Done Done F11X F11X
1 3 0 nm
1 3 0 nm
Proc e ss
Proc e ss
(3 0 0 m m )
(3 0 0 m m )
Agility Agility
9 0 nm c a pa c it y ra m p
9 0 nm c a pa c it y ra m p
Intel 0.13um
Intel 0.13um
Intel 90nm
Intel 90nm
F11X
F11X
D1C
D1C Ramping 90nm faster with only Three 300mm fabs!
D1C
D1C
F24
F24
F11X
F11X
WSPW
WSPW (200mm (200mm Equivalent)Equivalent)
Q
Q Q+1Q+1 Q+2Q+2 Q+3Q+3 Q+4Q+4 Q+5Q+5 Q+6Q+6 Q+7Q+7
(Quarter in Ramp) (Quarter in Ramp)
**Source: Intel Estimates
Operational Operational Excellence
Excellence
I nt e l’s M a nufa c t uring
I nt e l’s M a nufa c t uring
Le a de rship
Le a de rship
y
y
Scale:
Scale:
–
–
Leading edge capacity, investment capability & people
Leading edge capacity, investment capability & people
y
y
Agility:
Agility:
–
–
Customer Responsiveness
Customer Responsiveness
y
y
Operational Excellence:
Operational Excellence:
–
I nt e l Y ie ld M a t c hing T hrough
I nt e l Y ie ld M a t c hing T hrough
Copy Ex a c t ly
Operational Operational Excellence Excellence
Copy Ex a c t ly
Month
Log (Die Yield)
0.5µm (3 fabs)
0.35µm (3 fabs)
0.25µm
(3 fabs) 180 nm
(5 fabs)
Y ie ld T re nd
Y ie ld T re nd
1997 1998 1999 2000 2001 2002 2003 2004
Defect Density (log scale)
Operational Operational Excellence
Excellence
Copy Ex a c t ly! M e t hod
Copy Ex a c t ly! M e t hod
•
Matching At All Levels
• Same Physical Inputs
• Statistically Matched
Responses (Outputs)
•
Keeping Matched
• Coordinated Changes
• Audits
• Process Control System
• Joint Fab Mgmt Structure
Product:
-Yield -Reliability
Module:
-CD’s -SEM -Visual -Electrical
Equipment/Process: -Etch/Dep Rates -Thicknesses
-Particles -Film Comp
Physical Inputs:
-Recipes -Chemicals -Clean room -Facilities -Gases -Equipment
Better Quality and Faster Improvements
Better Quality and Faster Improvements
Sum m a ry
Sum m a ry
y
y
Intel’s manufacturing leadership (through scale,
Intel’s manufacturing leadership (through scale,
agility, and operational excellence) will enable a
agility, and operational excellence) will enable a
rapid transition to our 90nm products
rapid transition to our 90nm products
y
y
300mm capacity is coming on
300mm capacity is coming on
-
-
line rapidly to support
line rapidly to support
Intel’s microprocessor roadmap
Intel’s microprocessor roadmap
y
y
Intel’s 90nm technology ramp is underway and on
Intel’s 90nm technology ramp is underway and on
track
1
Fa b1 1 X 9 0 nm St a t us
Fa b1 1 X 9 0 nm St a t us
Scale Scale
Inline Monitors
Full Loop Short route 1 Short route 2 D1C Mean
